Natsuki Makino
Ebara Corporation
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Natsuki Makino.
international symposium on semiconductor manufacturing | 2000
Manabu Tsujimura; Koji Mishima; Junji Kunisawa; Natsuki Makino; Tetsuo Matsuda; Hisashi Kaneko; Katsuya Okumura
A novel compact ECD (Electro chemical Deposition) tool was designed and developed for Cu multi-level interconnection. The design enables the entire plating process (i.e., pre-processing, electro-chemical deposition, cleaning, and drying processed wafers) to be performed using a single module, by which means optimum Raw Process Time, good uptime and low COO can be achieved The merit of the unique design using a porous ceramic presented here are non-uniformity improvement, edge profile control, and black-film protection.
Archive | 2004
Koji Mishima; Hiroaki Inoue; Natsuki Makino; Junji Kunisawa; Kenji Nakamura; Tetsuo Matsuda; Hisashi Kaneko; Toshiyuki Morita
Archive | 2001
Norio Kimura; Koji Mishima; Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Manabu Tsujimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Tetsuo Matsuda; Hisashi Kaneko; Toshiyuki Morita; Nobuo Hayasaka; Katsuya Okumura
Archive | 2001
Koji Mishima; Junji Kunisawa; Natsuki Makino; Norio Kimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Takahiro Nanjo; Mitsuko Odagaki
Archive | 2000
Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita
Archive | 2009
Mitsuru Miyazaki; Seiji Katsuoka; Naoki Matsuda; Junji Kunisawa; Kenichi Kobayashi; Hiroshi Sotozaki; Hiroyuki Shinozaki; Osamu Nabeya; Shinya Morisawa; Takahiro Ogawa; Natsuki Makino
Archive | 2000
Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita
Archive | 2004
Hidenao Suzuki; Kazufumi Nomura; Kunihito Ide; Hiroyuki Kanda; Koji Mishima; Naoki Mihara; Natsuki Makino; Seiji Katsuoka
Archive | 2004
Tsutomu Nakada; Junji Kunisawa; Hiroyuki Kanda; Mizuki Nagai; Satoru Yamamoto; Koji Mishima; Shinya Morisawa; Seiji Katsuoka; Natsuki Makino; Yukio Fukunaga
Archive | 2004
Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Hiroaki Inoue