Natsuki Makino
Ebara Corporation
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Publication
Featured researches published by Natsuki Makino.
international symposium on semiconductor manufacturing | 2000
Manabu Tsujimura; Koji Mishima; Junji Kunisawa; Natsuki Makino; Tetsuo Matsuda; Hisashi Kaneko; Katsuya Okumura
A novel compact ECD (Electro chemical Deposition) tool was designed and developed for Cu multi-level interconnection. The design enables the entire plating process (i.e., pre-processing, electro-chemical deposition, cleaning, and drying processed wafers) to be performed using a single module, by which means optimum Raw Process Time, good uptime and low COO can be achieved The merit of the unique design using a porous ceramic presented here are non-uniformity improvement, edge profile control, and black-film protection.
Archive | 2004
Koji Mishima; Hiroaki Inoue; Natsuki Makino; Junji Kunisawa; Kenji Nakamura; Tetsuo Matsuda; Hisashi Kaneko; Toshiyuki Morita
Archive | 2001
Norio Kimura; Koji Mishima; Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Manabu Tsujimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Tetsuo Matsuda; Hisashi Kaneko; Toshiyuki Morita; Nobuo Hayasaka; Katsuya Okumura
Archive | 2001
Koji Mishima; Junji Kunisawa; Natsuki Makino; Norio Kimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Takahiro Nanjo; Mitsuko Odagaki
Archive | 2000
Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita
Archive | 2009
Mitsuru Miyazaki; Seiji Katsuoka; Naoki Matsuda; Junji Kunisawa; Kenichi Kobayashi; Hiroshi Sotozaki; Hiroyuki Shinozaki; Osamu Nabeya; Shinya Morisawa; Takahiro Ogawa; Natsuki Makino
Archive | 2000
Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita
Archive | 2004
Hidenao Suzuki; Kazufumi Nomura; Kunihito Ide; Hiroyuki Kanda; Koji Mishima; Naoki Mihara; Natsuki Makino; Seiji Katsuoka
Archive | 2004
Tsutomu Nakada; Junji Kunisawa; Hiroyuki Kanda; Mizuki Nagai; Satoru Yamamoto; Koji Mishima; Shinya Morisawa; Seiji Katsuoka; Natsuki Makino; Yukio Fukunaga
Archive | 2004
Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Hiroaki Inoue
