Is this you? Create Your Porfile
Avatar

Mitsuko Odagaki

Ebara Corporation

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Mitsuko Odagaki is active.

Explore More

Publication

Featured researches published by Mitsuko Odagaki.

Archive | 2001

Semiconductor substrate processing apparatus and method

Norio Kimura; Koji Mishima; Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Manabu Tsujimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Tetsuo Matsuda; Hisashi Kaneko; Toshiyuki Morita; Nobuo Hayasaka; Katsuya Okumura

Archive | 2001

Substrate processing apparatus and substrate plating apparatus

Koji Mishima; Junji Kunisawa; Natsuki Makino; Norio Kimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Takahiro Nanjo; Mitsuko Odagaki

Archive | 2000

Plating apparatus and plating method for substrate

Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita

Archive | 2000

Apparatus for plating substrate, method for plating substrate, electrolytic processing method, and apparatus thereof

Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita

Archive | 2004

Apparatus and method for plating a substrate, and method and apparatus for electrolytic treatment

Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Hiroaki Inoue

Archive | 2002

Apparatus for plating semiconductor substrate, method for plating semiconductor substrate

Junje Kunisawa; Mitsuko Odagaki; Natsuki Makino

Archive | 2000

Semiconductor wafer processing apparatus and processing method

Norio Kimura; Koji Mishima; Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Manabu Tsujimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Tetsuo Matsuda; Hisashi Kaneko; Toshiyuki Morita; Nobuo Hayasaka; Katsuya Okumura

Archive | 2003

Method of performing electrolytic treatment on a conductive layer of a substrate

Junji Kunisawa; Mitsuko Odagaki; Natsuki Makino; Koji Mishima; Kenji Nakamura; Hiroaki Inoue; Norio Kimura; Tetsuo Matsuda; Hisashi Kaneko; Nobuo Hayasaka; Katsuya Okumura; Manabu Tsujimura; Toshiyuki Morita

Archive | 2001

Substratverarbeitungsvorrichtung A substrate processing apparatus

Koji Mishima; Junji Kunisawa; Natsuki Makino; Norio Kimura; Hiroaki Inoue; Kenji Nakamura; Moriji Matsumoto; Takahiro Nanjo; Mitsuko Odagaki

Archive | 2001

Prozessvorrichtung und Plattierungsvorrichtung für Substrate

Hiroaki Inoue; Norio Kimura; Junji Kunisawa; Natsuki Makino; Moriji Matsumoto; Koji Mishima; Kenji Nakamura; Takahiro Nanjo; Mitsuko Odagaki

Explore More

Collaboration

Dive into the Mitsuko Odagaki's collaboration.

Top Co-Authors
Avatar

Natsuki Makino

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hiroaki Inoue

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Junji Kunisawa

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Koji Mishima

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Kenji Nakamura

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Norio Kimura

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Hisashi Kaneko

Toshiba

View shared research outputs
Top Co-Authors
Avatar

Katsuya Okumura

University of Tokyo

View shared research outputs
Top Co-Authors
Avatar

Manabu Tsujimura

Ebara Corporation

View shared research outputs
Top Co-Authors
Avatar

Moriji Matsumoto

Ebara Corporation

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge