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Kazuhiro Enomoto

Hitachi

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Publication

Featured researches published by Kazuhiro Enomoto.

Archive | 2003

Polishing fluid and polishing method

Yasushi Kurata; Hiroshi Ono; Yasuo Kamigata; Kazuhiro Enomoto

Archive | 2007

Polishing slurry and polishing method

Yasushi Kurata; Hiroshi Ono; Yasuo Kamigata; Kazuhiro Enomoto

Archive | 2004

Cmp polishing compound and polishing method

Masato Fukasawa; Masato Yoshida; Naoyuki Koyama; Yuto Ootsuki; Chiaki Yamagishi; Kazuhiro Enomoto; Kouji Haga; Yasushi Kurata

Archive | 2010

CMP POLISHING LIQUID, METHOD FOR POLISHING SUBSTRATE, AND ELECTRONIC COMPONENT

Takashi Shinoda; Kazuhiro Enomoto; Toshiaki Akutsu

Archive | 2007

Polishing slurry for chemical mechanical polishing and method for polishing substrate

Kouji Haga; Yuto Ootsuki; Yasushi Kurata; Kazuhiro Enomoto

Archive | 2005

Composition for forming silica based coating film, silica based coating film and method for preparation thereof, and electronic parts

Haruaki Sakurai; Kouichi Abe; Kazuhiro Enomoto; Shigeru Nobe

Archive | 2006

Polishing slurry for silicon oxide, additive liquid and polishing method

Masaya Nishiyama; Kazuhiro Enomoto; Masato Fukasawa; Toshiaki Akutsu; Yuuto Otsuki; Toranosuke Ashizawa

Archive | 2002

Cmp abrasive and method of polishing substrate

Kazuhiro Enomoto; Naoyuki Koyama; Yutaka Ono; Hiroto Otsuki; 裕人 大槻; 直之 小山; 裕 小野; 和宏 榎本

Archive | 1999

SILICA-BASED FILM, METHOD OF FORMING SILICA-BASED FILM, AND ELECTRONIC COMPONENT HAVING SILICA-BASED FILM

Kazuhiro Enomoto; Hiroyuki Morishima; Takenori Narita; Shigeru Nobe; Haruaki Sakurai; Nobuko Terada; 信子 寺田; 武憲 成田; 治彰 桜井; 浩之 森嶋; 和宏 榎本; 茂 野部

Archive | 2003

Abrasive agent, polishing method, and manufacturing method of electronic component

Kazuhiro Enomoto; Koji Haga; Yasushi Kurata; 靖 倉田; 和宏 榎本; 浩二 芳賀

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Collaboration

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Shigeru Nobe

Hitachi

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Yasushi Kurata

Hitachi

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Haruaki Sakurai

Hitachi

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Masato Fukasawa

Hitachi

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Yasuo Kamigata

Hitachi

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Toshiaki Akutsu

Hitachi

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Hiroshi Ono

University of Electro-Communications

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Chiaki Yamagishi

Hitachi

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Hiroyuki Morishima

Hitachi

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Koichi Abe

Hitachi

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