Kevin Joseph Bautista

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Featured researches published by Kevin Joseph Bautista.

Archive | 2011

Methods and apparatus for deposition processes

Nyi O. Myo; Kevin Joseph Bautista; Zhiyuan Ye; Schubert S. Chu; Yihwan Kim

Archive | 2009

Cvd reactor with multiple processing levels and dual-axis motorized lift mechanism

Richard O. Collins; Nyi O. Myo; Kevin Joseph Bautista; John S. Webb; Errol C. Sanchez; Yi-Chiau Huang; Kailash Kiran Patalay; Zhi Yuan Zhou; Wilson Yu

Archive | 2012

APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE

Errol Antonio C. Sanchez; Richard O. Collins; David K. Carlson; Kevin Joseph Bautista; Herman Diniz; Kailash Kiran Patalay; Nyi O. Myo; Dennis L. Demars; Christophe Marcadal; Steve Jumper; Satheesh Kuppurao

Archive | 2015

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK

Schubert S. Chu; Anhthu Ngo; Karthik Ramanathan; Nitin Pathak; Nyi O. Myo; Paul Brillhart; Richard O. Collins; Kevin Joseph Bautista; Edric Tong; Zhepeng Cong; Anzhong Chang; Kin Pong Lo; Manish Hemkar

Archive | 2010

Epitaxial chamber with cross flow

Errol Antonio C. Sanchez; Nyi O. Myo; Kevin Joseph Bautista; Harpreet Singh Juneja; Zuoming Zhu

Archive | 2013

Minimal contact edge ring for rapid thermal processing

Sairaju Tallavarjula; Kevin Joseph Bautista; Jeffrey Tobin

Archive | 2015

SUBSTRATE THERMAL CONTROL IN AN EPI CHAMBER

Anhthu Ngo; Schubert S. Chu; Nyi O. Myo; Paul Brillhart; Yi-Chiau Huang; Zuoming Zhu; Kevin Joseph Bautista; Edric Tong; Xuebin Li; Zhepeng Cong

Archive | 2015

APPARATUS FOR GAS INJECTION TO EPITAXIAL CHAMBER

Xuebin Li; Kevin Joseph Bautista; Avinash Shervegar; Yihwan Kim; Nyi O. Myo; Abhishek Dube

Archive | 2015

THERMAL PROCESSING SUSCEPTOR

Anhthu Ngo; Zuoming Zhu; Paul Brillhart; Edric Tong; Anzhong Chang; Kin Pong Lo; Schubert S. Chu; Zhepeng Cong; James Francis Mack; Nyi O. Myo; Kevin Joseph Bautista; Xuebin Li; Yi-Chiau Huang; Zhiyuan Ye

Archive | 2014