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Kikuo Douta

Hitachi

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Publication

Featured researches published by Kikuo Douta.

Archive | 1981

Method of forming a microscopic pattern

Toshiharu Matsuzawa; Kikuo Douta; Takao Iwayanagi; Hiroshi Yanazawa

Archive | 1984

Method of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etching

Toshiharu Matsuzawa; Takao Iwayanagi; Kikuo Douta; Hiroshi Yanazawa; Takahiro Kohashi; Saburo Nonogaki

Archive | 1975

Method of etching photography

Norio Hasegawa; Hiroshi Yanagisawa; Kikuo Douta

Archive | 1974

Method of forming fine pattern of thin, transparent, conductive film

Akira Sasano; Kikuo Douta; Mikio Ashikawa

Archive | 1974

Method for controlling the degree of side-etch in thin oxide films by photo-etching process

Hiroshi Yanazawa; Norikazu Hashimoto; Mikio Ashikawa; Kikuo Douta

Archive | 1981

Method of forming a microscopic pattern, and a photoresist

Toshiharu Matsuzawa; Takao Iwayanagi; Kikuo Douta; Hiroshi Yanazawa; Takahiro Kohashi; Saburo Nonogaki

Journal of Applied Polymer Science | 1985

Double exposure stabilization of positive photoresist

Hiroshi Yanazawa; Norio Hasegawa; Kikuo Douta; Norikazu Hashimoto

Archive | 1966

METHOD OF MANUFACTURING INTEGRATED CIRCUITS

Kikuo Douta; Haruo Matumaru; Takeo Nishimura

Archive | 1981

Verfahren zum Formen eines mikroskopischen Musters, sowie ein Photolack

Toshiharu Matsuzawa; Takao Iwayanagi; Kikuo Douta; Hiroshi Yanazawa; Takahiro Kohashi; Saburo Nonogaki

Archive | 1981

Verfahren zum Herstellen eines mikroskopischen Musters

Toshiharu Matsuzawa; Kikuo Douta; Takao Iwayanagi; Hiroshi Yanagisawa

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Hiroshi Yanazawa

Hitachi

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Takao Iwayanagi

Hitachi

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Toshiharu Matsuzawa

Hitachi

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Mikio Ashikawa

Hitachi

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Akira Sasano

Hitachi

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Saburo Nonogaki

Hitachi

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Takahiro Kohashi

Hitachi

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Norikazu Hashimoto

Hitachi

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Norio Hasegawa

Hitachi

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Haruo Matumaru

Hitachi

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