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Dive into the research topics where Lara Hawrylchak is active.

Publication


Featured researches published by Lara Hawrylchak.


Archive | 2008

Physical vapor deposition reactor with circularly symmetric rf feed and dc feed to the sputter target

Daniel J. Hoffman; Ying Rui; Karl M. Brown; John Pipitone; Lara Hawrylchak


Archive | 2010

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMITY AND STEP-COVERAGE OF THIS PROCESS

Adolph Miller Allen; Lara Hawrylchak; Zhigang Xie; Muhammand M. Rasheed; Rongjun Wang; Xianmin Tang; Zhendong Liu; Tza-Jing Gung; Srinivas Gandikota; Mei Chang; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Zhenbin Ge


Archive | 2009

Process kit for rf physical vapor deposition

Donny Young; Lara Hawrylchak


Archive | 2011

Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit

Muhammad Rasheed; Ronald D. Dedore; Michael S. Cox; Keith A. Miller; Donny Young; John C. Forster; Adolph Miller Allen; Lara Hawrylchak


Archive | 2011

APPARATUS FOR PHYSICAL VAPOR DEPOSITION HAVING CENTRALLY FED RF ENERGY

Muhammad Rasheed; Lara Hawrylchak; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Alan Ritchie


Archive | 2015

EXTENDED LIFE DEPOSITION RING

Lara Hawrylchak


Archive | 2014

Method and apparatus for precleaning a substrate surface prior to epitaxial growth

Christopher S. Olsen; Theresa Kramer Guarini; Jeffrey Tobin; Lara Hawrylchak; Peter Stone; Chi Wei Lo; Saurabh Chopra


Archive | 2014

In-situ removable electrostatic chuck

Michael S. Cox; Lara Hawrylchak; Steven V. Sansoni


Archive | 2013

Methods and apparatus for processing substrates using an ion shield

Jeffrey Tobin; Bernard L. Hwang; Canfeng Lai; Lara Hawrylchak; Wei Liu; Johanes Swenberg


Archive | 2011

Adjustable process spacing, centering, and improved gas conductance

Lara Hawrylchak; Kirankumar Savandaiah

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