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Lara Hawrylchak

Applied Materials

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Publication

Featured researches published by Lara Hawrylchak.

Archive | 2008

Physical vapor deposition reactor with circularly symmetric rf feed and dc feed to the sputter target

Daniel J. Hoffman; Ying Rui; Karl M. Brown; John Pipitone; Lara Hawrylchak

Archive | 2010

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMITY AND STEP-COVERAGE OF THIS PROCESS

Adolph Miller Allen; Lara Hawrylchak; Zhigang Xie; Muhammand M. Rasheed; Rongjun Wang; Xianmin Tang; Zhendong Liu; Tza-Jing Gung; Srinivas Gandikota; Mei Chang; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Zhenbin Ge

Archive | 2009

Process kit for rf physical vapor deposition

Donny Young; Lara Hawrylchak

Archive | 2011

Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit

Muhammad Rasheed; Ronald D. Dedore; Michael S. Cox; Keith A. Miller; Donny Young; John C. Forster; Adolph Miller Allen; Lara Hawrylchak

Archive | 2011

APPARATUS FOR PHYSICAL VAPOR DEPOSITION HAVING CENTRALLY FED RF ENERGY

Muhammad Rasheed; Lara Hawrylchak; Michael S. Cox; Donny Young; Kirankumar Savandaiah; Alan Ritchie

Archive | 2015

EXTENDED LIFE DEPOSITION RING

Lara Hawrylchak

Archive | 2014

Method and apparatus for precleaning a substrate surface prior to epitaxial growth

Christopher S. Olsen; Theresa Kramer Guarini; Jeffrey Tobin; Lara Hawrylchak; Peter Stone; Chi Wei Lo; Saurabh Chopra

Archive | 2014

In-situ removable electrostatic chuck

Michael S. Cox; Lara Hawrylchak; Steven V. Sansoni

Archive | 2013

Methods and apparatus for processing substrates using an ion shield

Jeffrey Tobin; Bernard L. Hwang; Canfeng Lai; Lara Hawrylchak; Wei Liu; Johanes Swenberg

Archive | 2011

Adjustable process spacing, centering, and improved gas conductance

Lara Hawrylchak; Kirankumar Savandaiah

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Donny Young

Applied Materials

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Christopher S. Olsen

Applied Materials

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Kirankumar Savandaiah

Applied Materials

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Michael S. Cox

Applied Materials

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Jeffrey Tobin

Applied Materials

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Muhammad Rasheed

Applied Materials

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Adolph Miller Allen

Applied Materials

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Agus Tjandra

Applied Materials

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Bernard L. Hwang

Applied Materials

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Canfeng Lai

Applied Materials

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