Klaus-Dieter Rinnen | Researchain

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Featured researches published by Klaus-Dieter Rinnen.

Archive | 1996

Utilization of SiH4 soak and purge in deposition processes

Meng Chu Tseng; Mei Chang; Ramanujapuram A. Srinivas; Klaus-Dieter Rinnen; M. Eizenberg; Susan Telford

Archive | 1996

Computer-implemented inter-chamber synchronization in a multiple chamber substrate processing system

Klaus-Dieter Rinnen; Cory Czarnik

Archive | 1997

Substrate having uniform tungsten silicide film and method of manufacture

Susan Telford; Meng Chu Tseng; Michio Aruga; Klaus-Dieter Rinnen

Archive | 1995

Method of processing a substrate in a vacuum processing chamber

Meng Chu Tseng; Mei Chang; Ramanujapuram A. Srinivas; Klaus-Dieter Rinnen; M. Eizenberg; Susan Telford

Archive | 1997

Method of forming tungsten-silicide

Cory Czarnik; Klaus-Dieter Rinnen; Vedapuram S. Achutharaman; Mahalingam Venkatesan

Archive | 1997

Integrated tungsten-silicide processes

Cory Czarnik; Vedapuram S. Achutharaman; Mahalingam Venkatesan; Klaus-Dieter Rinnen

Archive | 1996

Purge in silicide deposition processes dichlorosilane

Jennifer Tseng; Mei Chang; Ramanujapuram A. Srinivas; Klaus-Dieter Rinnen; M. Eizenberg; Susan Weihar Telford

Archive | 1995

Utilization of sih4 soak and purge in deposition process

Mei Chang; M. Eizenberg; Klaus-Dieter Rinnen; Ramanujapuram A. Srinivas; Susan Telford; Meng Chu Tseng; リネンクラウス−ディエター; テルフォードスーザン; チャンメイ; チュツェンメン; アイゼンバーグモシェ; エー．スリニバスラマヌジャプラム

Archive | 1997