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Klaus Penner

IBM

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Publication

Featured researches published by Klaus Penner.

Archive | 1997

Control of gas content in process liquids for improved megasonic cleaning of semiconductor wafers and microelectronics substrates

Susan L. Cohen; Emmanuel I. Cooper; Klaus Penner; David L. Rath; Kamalesh K. Srivastava

Archive | 1998

Fabrication of trench capacitors using disposable hard mask

Matthias Ilg; Richard L. Kleinhenz; Soichi Nadahara; Ronald W. Nunes; Klaus Penner; Klaus Roithner; Radhika Srinivasan; Shigeki Sugimoto

Archive | 1998

Trench etching using borosilicate glass mask

Matthias Ilg; Richard L. Kleinhenz; Soichi Nadahara; Ronald W. Nunez; Klaus Penner; Klaus Roithner; Radhika Srinivasan; Shigeki Sugimoto

Archive | 1998

Cleaning of semiconductor wafers and microelectronics substrates

Susan L. Cohen; Emmanuel I. Cooper; Klaus Penner; David L. Rath; Kamalesh K. Srivastava

Archive | 1997

Method of end point detection using a sinusoidal interference signal for a wet etch process

K. Paul Muller; Klaus Penner

Archive | 1998

Method of end point detection for a wet etch process

Karl Paul Muller; Klaus Penner

Archive | 1998

Method for end-point detection of wet etching process

Karl Paul Muller; Klaus Penner; パウル ムラー カール; ディーター ペナー クラウス

Archive | 2000

High etch selectivity etchant for doped silicate glass

Klaus Penner; Hans-Juergen Kruwinus; Matthias Ilg

Archive | 1998

Procédé pour la détection du point final dans un traitement de gravure mouillé

Karl Paul Muller; Klaus Penner

Archive | 1998

Reinigen von Halbleiterscheiben und Mikroelektronik-Substraten Cleaning of semiconductor wafers and microelectronics substrates

Susan Austin Cohen; Emmanuel I. Cooper; Klaus Penner; David L. Rath; Kamalesh K. Srivastava

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Matthias Ilg

IBM

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David L. Rath

IBM

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Emmanuel I. Cooper

IBM

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Kamalesh K. Srivastava

IBM

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Klaus Roithner

IBM

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Radhika Srinivasan

IBM

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Richard L. Kleinhenz

IBM

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Shigeki Sugimoto

IBM

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Soichi Nadahara

IBM

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Ronald W. Nunez

IBM

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