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Publication
Featured researches published by Richard L. Kleinhenz.
advanced semiconductor manufacturing conference | 2009
Horst Zisgen; Richard L. Kleinhenz; Hans-Jurgen Eickelmann; Manfred Haubrich; Frank Marschollek
A system to predict chemical consumption in semiconductor fabrication is presented. The model is a bottom-up approach based on the routes and the associated process steps. Consumptions are modeled as variable and fixed in order to enable the analysis of product mix and workload dependencies. Additionally it is shown how the huge amount of data needed to feed such a detailed model can be acquired and how the model is implemented in the 300mm fab of IBM in East Fishkill, NY.
Archive | 1998
Hiroyuki Akatsu; Tze-Chiang Chen; Laertis Economikos; Herbert L. Ho; Richard L. Kleinhenz; Jack A. Mandelman; Wesley C. Natzle
Archive | 1997
Richard L. Kleinhenz; Wesley C. Natzle; Chienfan Yu
Archive | 1998
Richard L. Kleinhenz
Archive | 1997
Richard L. Kleinhenz; Wesley C. Natzle; Chienfan Yu
Archive | 1997
Richard L. Kleinhenz; Wesley C. Natzle; Chienfan Yu
Archive | 2001
Richard L. Kleinhenz; Daniel Moy; Robert E. Bendernagel; Harold J. Hovel
Archive | 1999
Richard L. Kleinhenz; Carl J. Radens
Archive | 1998
Richard L. Kleinhenz; Wesley C. Natzle; Chienfan Yu
Archive | 1997
Badih El-Kareh; Richard L. Kleinhenz; Stanley E. Schuster
