Network


Latest external collaboration on country level. Dive into details by clicking on the dots.

Hotspot


Dive into the research topics where Klaus Roithner is active.

Publication


Featured researches published by Klaus Roithner.


Archive | 1995

Etch profile shaping through wafer temperature control

Karl Paul Muller; Klaus Roithner; Bernhard Poschenrieder; Toru Watanabe


Archive | 1996

Distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loops

Klaus Roithner; Bernhard Poschenrieder; Karl Paul Muller


Archive | 1996

Pad stack with a poly SI etch stop for TEOS mask removal with RIE

Karl Paul Muller; Bernhard Poschenrieder; Klaus Roithner


Microelectronic Engineering | 1995

Selectivity and Si-load in deep trench etching

K. Paul Muller; Klaus Roithner; Hans-Jörg Timme


Archive | 1998

Fabrication of trench capacitors using disposable hard mask

Matthias Ilg; Richard L. Kleinhenz; Soichi Nadahara; Ronald W. Nunes; Klaus Penner; Klaus Roithner; Radhika Srinivasan; Shigeki Sugimoto


Archive | 1998

Trench etching using borosilicate glass mask

Matthias Ilg; Richard L. Kleinhenz; Soichi Nadahara; Ronald W. Nunez; Klaus Penner; Klaus Roithner; Radhika Srinivasan; Shigeki Sugimoto


Archive | 1995

Enhanced deep trench storage node capacitance for DRAM

Richard L. Kleinhenz; Karl Paul Muller; Klaus Roithner; Masakatsu Tuschiaki


Archive | 2000

Method and apparatus for preventing formation of black silicon on edges of wafers

Dung Ching Perng; David M. Dobuzinsky; Ting Hao Wang; Klaus Roithner


Archive | 1997

Gas distributing plate for reaction chamber

Karl Paul Muller; Bernhard Poschenrieder; Klaus Roithner; パウル ムラー カール; ロイトナー クラウス; ポッシェンリーダー ベルンハルト


Archive | 1997

Distribution plate for a reaction chamber

Karl Paul Muller; Bernhard Poschenrieder; Klaus Roithner

Researchain Logo
Decentralizing Knowledge