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Dive into the research topics where Kosuke Imafuku is active.

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Featured researches published by Kosuke Imafuku.


Archive | 2001

Plasma treatment method and apparatus

Masayuki Tomoyasu; Akira Koshiishi; Kosuke Imafuku; Shosuke Endo; Kazuhiro Tahara; Yukio Naito; Kazuya Nagaseki; Keizo Hirose; Mitsuaki Komino; Hiroto Takenaka; Hiroshi Nishikawa; Yoshio Sakamoto


Archive | 2005

VACUUM PROCESSING DEVICE

Kosuke Imafuku; Tsuyoshi Hida


Archive | 2001

Worktable device and plasma processing apparatus for semiconductor process

Toshifumi Nagaiwa; Shuei Sekizawa; Kosuke Imafuku; Jun Ooyabu


Archive | 2001

Plasma treatment apparatus and method

Takao Sakamoto; Kazuhiro Tahara; Kenji Momose; Kosuke Imafuku; Shosuke Endo; Yukio Naito; Kazuya Nagaseki; Keizo Hirose


Archive | 1995

Plasma processing method and plasma etching method

Hiroshi Tsuchiya; Yoshio Fukasawa; Shuji Mochizuki; Yukio Naito; Kosuke Imafuku


Archive | 1998

Plasma treatment method utilizing an amplitude-modulated high frequency power

Masayuki Tomoyasu; Akira Koshiishi; Kosuke Imafuku; Shosuke Endo; Kazuhiro Tahara; Yukio Naito; Kazuya Nagaseki; Keizo Hirose; Mitsuaki Komino; Hiroto Takenaka; Hiroshi Nishikawa; Yoshio Sakamoto


Archive | 1995

Plasma treatment device, processing device and etching device

Shiyousuke Endou; Yoshio Fukazawa; Keizo Hirose; Kosuke Imafuku; Isao Kobayashi; Akira Koshiishi; Kazuya Nagaseki; Yukio Naito; Tatsu Nonaka; Kazuhiro Tawara; Masayuki Tomoyasu; Hiroshi Tsuchiya; 光祐 今福; 幸男 内藤; 昌幸 友安; 浩 土屋; 功 小林; 圭三 広瀬; 一也 永関; 義男 深澤; 一弘 田原; 公 輿石; 昇佐 遠藤; 龍 野中


Archive | 2008

Plasma processing apparatus and electrode plate, electrode supporting body, and shield ring thereof

Masahiro Ogasawara; Kazuya Kato; Toshifumi Nagaiwa; Kosuke Imafuku; Koichi Kazama


Archive | 1996

Gas diffusion plate for electrode of semiconductor wafer processing apparatus

Kosuke Imafuku; Shosuke Endo; Kazuo Fukasawa


Archive | 2011

METHOD OF RECYCLING SILICON COMPONENT FOR PLASMA ETCHING APPARATUS AND SILICON COMPONENT FOR PLASMA ETCHING APPARATUS

Kosuke Imafuku

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