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Kyle A. Brown

KLA-Tencor

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Dive into the research topics where Kyle A. Brown is active.

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Publication

Featured researches published by Kyle A. Brown.

Archive | 2012

Methods and systems for determining a critical dimension and overlay of a specimen

Ady Levy; Kyle A. Brown; Rodney Smedt; Gary Bultman; Mehrdad Nikoonahad; Dan Wack; Ibramhim Abdulhalim

Archive | 2001

Methods and systems for determining a critical dimension and a thin film characteristic of a specimen

Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack

Archive | 2003

Methods and systems for lithography process control

Suresh Lakkapragada; Kyle A. Brown; Matt Hankinson; Ady Levy

Archive | 2001

Methods and systems for determining a presence of macro defects and overlay of a specimen

Dan Wack; Ady Levy; Kyle A. Brown; Gary Bultman; Mehrdad Nikoonahad

Archive | 2001

Methods and systems for determining at least four properties of a specimen

Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack

Archive | 2001

Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen

Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack

Archive | 2001

Methods and systems for determining a presence of macro and micro defects on a specimen

Gary Bultman; Ady Levy; Kyle A. Brown; Mehrdad Nikoonahad; Dan Wack

Archive | 2001

Methods and systems for determining an implant characteristic and a presence of defects on a specimen

Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack

Archive | 2001

Methods and systems for determining a critical dimension an a presence of defects on a specimen

Dan Wack; Ady Levy; Kyle A. Brown; Gary Bultman; Mehrdad Nikoonahad

Archive | 2001

Methods and systems for determining overlay and flatness of a specimen

Ady Levy; Kyle A. Brown; Mehrdad Nikoonahad; Gary Bultman; Dan Wack

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Collaboration

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Ady Levy

KLA-Tencor

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Dan Wack

KLA-Tencor

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Gary Bultman

KLA-Tencor

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Mehrdad Nikoonahad

KLA-Tencor

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Rodney Smedt

KLA-Tencor

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Ibramhim Abdulhalim

KLA-Tencor

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Matt Hankinson

KLA-Tencor

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Suresh Lakkapragada

KLA-Tencor

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