Dan Wack
KLA-Tencor
Network
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Publication
Featured researches published by Dan Wack.
Proceedings of SPIE | 2008
P. L. Jiang; H. Chu; John J. Hench; Dan Wack
A review of selected current and new Maxwell equation solve algorithms used in critical dimension metrology is presented. We show that the standard RCWA can have serious issues under certain conditions, even in some typical scatterometry applications. We present some results showing that some of the newer algorithms we developed can significantly outperform the RCWA. The strengths and weakness of algorithms are illustrated.
Archive | 2012
Ady Levy; Kyle A. Brown; Rodney Smedt; Gary Bultman; Mehrdad Nikoonahad; Dan Wack; Ibramhim Abdulhalim
Archive | 2002
Mark Ghinovker; Michael E. Adel; Walter D. Mieher; Ady Levy; Dan Wack
Archive | 2001
Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack
Archive | 2001
Dan Wack; Ady Levy; Kyle A. Brown; Gary Bultman; Mehrdad Nikoonahad
Archive | 2001
Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack
Archive | 2001
Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack
Archive | 2001
Gary Bultman; Ady Levy; Kyle A. Brown; Mehrdad Nikoonahad; Dan Wack
Archive | 2001
Mehrdad Nikoonahad; Ady Levy; Kyle A. Brown; Gary Bultman; Dan Wack
Archive | 2001
Dan Wack; Ady Levy; Kyle A. Brown; Gary Bultman; Mehrdad Nikoonahad
