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Kyle Tantiwong

Applied Materials

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Publication

Featured researches published by Kyle Tantiwong.

Archive | 2012

HIGH EFFICIENCY TRIPLE-COIL INDUCTIVELY COUPLED PLASMA SOURCE WITH PHASE CONTROL

Samer Banna; Waheb Bishara; Ryan Giar; Valentin N. Todorow; Dmitry Lubomirsky; Kyle Tantiwong

Archive | 2013

Esc with cooling base

Dmitry Lubomirsky; Kyle Tantiwong

Archive | 2014

POWER DEPOSITION CONTROL IN INDUCTIVELY COUPLED PLASMA (ICP) REACTORS

Samer Banna; Tza-Jing Gung; Vladimir Knyazik; Kyle Tantiwong; Dan Marohl; Valentin N. Todorow; Stephen Yuen

Archive | 2014

Multi-zone heated esc with independent edge zones

Kyle Tantiwong; Vladimir Knyazik; Samer Banna

Archive | 2014

ELECTROSTATIC CHUCK WITH CONCENTRIC COOLING BASE

Dmitry Lubomirsky; Kyle Tantiwong; Samer Banna

Archive | 2014

MULTI-ZONE GAS INJECTION ASSEMBLY WITH AZIMUTHAL AND RADIAL DISTRIBUTION CONTROL

Yan Rozenzon; Kyle Tantiwong; Imad Yousif; Vladimir Knyazik; Bojenna Keating; Samer Banna

Archive | 2014

PLASMA REACTOR WITH HIGHLY SYMMETRICAL FOUR-FOLD GAS INJECTION

Yan Rozenzon; Kyle Tantiwong; Imad Yousif; Vladimir Knyazik; Bojenna Keating; Samer Banna

Archive | 2014

EXTREME EDGE AND SKEW CONTROL IN ICP PLASMA REACTOR

Samer Banna; Vladimir Knyazik; Kyle Tantiwong

Archive | 2014

Antenne à bobines à zones multiples pourvue d'une pluralité de lobes radiaux

Vladimir Knyazik; Samer Banna; Kyle Tantiwong

Archive | 2013

MULTIPLE ZONE COIL ANTENNA WITH PLURAL RADIAL LOBES

Vladimir Knyazik; Samer Banna; Kyle Tantiwong

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Collaboration

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Samer Banna

Applied Materials

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Vladimir Knyazik

Applied Materials

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Dmitry Lubomirsky

Applied Materials

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Bojenna Keating

Applied Materials

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Imad Yousif

Applied Materials

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Valentin N. Todorow

Applied Materials

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Waheb Bishara

Applied Materials

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Yan Rozenzon

Applied Materials

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Dan Marohl

Applied Materials

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Ryan Giar

Applied Materials

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