Joel M. Huston | Researchain

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Featured researches published by Joel M. Huston.

Archive | 1998

High temperature chemical vapor deposition chamber

Salvador P. Umotoy; Steve H. Chiao; Anh N. Nguyen; Be Van Vo; Joel M. Huston; James Jin-Long Chen; Lawrence Chung-Lai Lei

Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 1999

Integrated temperature controlled exhaust and cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen

Archive | 1998

Liquid vaporizer systems and methods for their use

Joel M. Huston; Fufa Chen

Archive | 2000

Cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen

Archive | 2005

In-situ dry clean chamber for front end of line production

Mei Chang; Jing-Pei Connie Chou; Joel M. Huston; Chien-Teh Kao; Chiukin Lai; Xinliang Lu; See-Eng Phan; Son Trinh; Sal Umotoy; Wie W. Wang; Xiaoxiong John Yuan; Chan Yuu; ダブリュ．ワンウィー; ウモトイサル; トリンサン; ファンシー−エン; （ジョン）ユアンシャオション; エム．ヒューストンジョエル; （コニー）チョウジン−ペイ; ルーシンリン; （スティーヴ）エヌライチウキン; カオチェン−テ; チャンメイ; チャンユー

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