Boris Govzman | Researchain

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Featured researches published by Boris Govzman.

Archive | 1997

Carrier head with a substrate detection mechanism for a chemical mechanical polishing system

Boris Govzman; Steven M. Zuniga; Hung Chen; Sasson Somekh

Archive | 2005

Single wafer dryer and drying methods

Younes Achkire; Alexander N. Lerner; Boris Govzman; Boris Fishkin; Michael Sugarman; Rashid Mavliev; Haoquan Fang; Shijian Li; Guy Shirazi; Jianshe Tang

Archive | 2002

Gripper design to reduce backlash

Boris Govzman

Archive | 2000

Gripper for supporting substrate in a vertical orientation

Boris Govzman; Manoocher Birang; Michael Sugarman; Anwar Husain

Archive | 1998

Apparatus and methods for handling a substrate

Boris Govzman; Konstantin Volodarsky; Leon Volfovski

Archive | 2000

Robotic gripper apparatus

Boris Govzman; Constantin Foxman

Archive | 1999

Method for detecting the presence of a substrate in a carrier head

Boris Govzman; Steven M. Zuniga; Hung Chen

Archive | 2000

Grippers with ability to change wafer orientation

Boris Govzman; Leon Volfovski

Archive | 2001

WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LISTApparatus and methods for handling a substrate

Boris Govzman; Konstantin Volodarsky; Leon Volfovski

Archive | 2006

Secheur de tranches isolees et methode de sechage

Younes Achkire; Alexander N. Lerner; Boris Govzman; Boris Fishkin; Michael Sugarman; Rashid Mavliev; Haoquan Fang; Shijian Li; Guy Shirazi; Jianshe Tang

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