Leonard Rodriguez
Katholieke Universiteit Leuven
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Publication
Featured researches published by Leonard Rodriguez.
Journal of Vacuum Science and Technology | 2013
Peter Antony Premkumar; Annelies Delabie; Leonard Rodriguez; Alain Moussa; Christoph Adelmann
The evolution of the surface roughness during the atomic-layer deposition (ALD) of Al2O3, NiO, and HfO2 was studied by atomic-force microscopy and nonspecular x-ray reflectance. The results indicate that the crystallinity of the films played a crucial role in the roughness evolution during ALD. While the ALD of amorphous oxide films showed replication of the initial starting surface with no roughness build-up, the ALD of polycrystalline oxide films led to a strong anomalous dependence of the roughness on the film thickness. This behavior is explained within a model taking into account spatial variations of the adsorption site density.
Chemistry of Materials | 2013
Christoph Adelmann; Daniel Cuypers; Massimo Tallarida; Leonard Rodriguez; Astrid De Clercq; Daniel Friedrich; Thierry Conard; Annelies Delabie; Jin Won Seo; Jean-Pierre Locquet; Stefan De Gendt; Dieter Schmeisser; Sven Van Elshocht; Matty Caymax
ECS Journal of Solid State Science and Technology | 2013
D. H. van Dorp; Daniel Cuypers; S. Arnauts; Alain Moussa; Leonard Rodriguez; S. De Gendt
ECS Journal of Solid State Science and Technology | 2014
Daniel Cuypers; D. H. van Dorp; Massimo Tallarida; Simone Brizzi; Thierry Conard; Leonard Rodriguez; Maarten Mees; S. Arnauts; Dieter Schmeisser; C. Adelmann; S. De Gendt
Chemical Vapor Deposition | 2012
Christoph Adelmann; Annelies Delabie; Bart Schepers; Leonard Rodriguez; Alexis Franquet; Thierry Conard; Karl Opsomer; Inge Vaesen; Alain Moussa; Geoffrey Pourtois; Kristine Pierloot; Matty Caymax; Sven Van Elshocht
Semiconductor Cleaning Science and Technology 13 | 2013
Daniel Cuypers; Dennis H. van Dorp; Massimo Tallarida; Simone Brizzi; Leonard Rodriguez; Thierry Conard; Sophia Arnauts; Dieter Schmeisser; Christoph Adelmann; Stefan De Gendt
Archive | 2013
D. H. van Dorp; Daniel Cuypers; S. Arnauts; Alain Moussa; Leonard Rodriguez; S. De Gendt
Archive | 2014
Daniel Cuypers; D. H. van Dorp; Massimo Tallarida; Simone Brizzi; Thierry Conard; Leonard Rodriguez; Maarten Mees; S. Arnauts; Dieter Schmeisser; C. Adelmann; S. De
Archive | 2013
Leonard Rodriguez; Christoph Adelmann; Ben Sutens; Gustaf Winroth; Annelies Delabie; Roel Gronheid; Sven Van Elshocht
Archive | 2012
Christoph Adelmann; Massimo Tallarida; Daniel Cuypers; Leonard Rodriguez; Marcel Michling; Daniel Friedrich; Astrid De Clercq; Annelies Delabie; Thierry Conard; Sven Van Elshocht; Jean-Pierre Locquet; Dieter Schmeisser; Matty Caymax
