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Dive into the research topics where Mukund Srinivasan is active.

Publication


Featured researches published by Mukund Srinivasan.


Archive | 2002

Stepped upper electrode for plasma processing uniformity

Rajinder Dhindsa; Mukund Srinivasan; Aaron Eppler; Eric Lenz


Archive | 2001

Dual frequency plasma processor

Rajinder Dhindsa; Mukund Srinivasan; Eric Lenz; Lumin Li


Archive | 2004

High aspect ratio etch using modulation of RF powers of various frequencies

Camelia Rusu; Rajinder Dhindsa; Eric Hudson; Mukund Srinivasan; Lumin Li; Felix Kozakevich


Archive | 2004

Multiple frequency plasma etch reactor

Raj Dhindsa; S.M. Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks


Archive | 2001

Chamber configuration for confining a plasma

Jian J. Chen; Mukund Srinivasan; Eric Lenz


Archive | 2002

Process for etching dielectric films with improved resist and/or etch profile characteristics

Aaron Eppler; Mukund Srinivasan; Robert Chebi


Archive | 2008

High lifetime consumable silicon nitride-silicon dioxide plasma processing components

Travis R. Taylor; Mukund Srinivasan; Bobby Kadkhodayan; Katgenahalli Y. Ramanujam; Biljana Mikijelj; Shanghua Wu


Archive | 2003

RF pulsing of a narrow gap capacitively coupled reactor

Peter Loewenhardt; Mukund Srinivasan; Andreas Fischer


Archive | 2007

Integrated capacitive and inductive power sources for a plasma etching chamber

Rajinder Dhindsa; Mukund Srinivasan; Kenji Takeshita; Alexei Marakhtanov; Andreas Fischer


Archive | 2001

Plasma processor in plasma confinement region within a vacuum chamber

Rajinder Dhindsa; Mukund Srinivasan; Eric Lenz; Lumin Li

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