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Mukund Srinivasan

Lam Research

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Publication

Featured researches published by Mukund Srinivasan.

Archive | 2002

Stepped upper electrode for plasma processing uniformity

Rajinder Dhindsa; Mukund Srinivasan; Aaron Eppler; Eric Lenz

Archive | 2001

Dual frequency plasma processor

Rajinder Dhindsa; Mukund Srinivasan; Eric Lenz; Lumin Li

Archive | 2004

High aspect ratio etch using modulation of RF powers of various frequencies

Camelia Rusu; Rajinder Dhindsa; Eric Hudson; Mukund Srinivasan; Lumin Li; Felix Kozakevich

Archive | 2004

Multiple frequency plasma etch reactor

Raj Dhindsa; S.M. Sadjadi; Felix Kozakevich; Dave Trussell; Lumin Li; Eric Lenz; Camelia Rusu; Mukund Srinivasan; Aaron Eppler; Jim Tietz; Jeffrey Marks

Archive | 2001

Chamber configuration for confining a plasma

Jian J. Chen; Mukund Srinivasan; Eric Lenz

Archive | 2002

Process for etching dielectric films with improved resist and/or etch profile characteristics

Aaron Eppler; Mukund Srinivasan; Robert Chebi

Archive | 2008

High lifetime consumable silicon nitride-silicon dioxide plasma processing components

Travis R. Taylor; Mukund Srinivasan; Bobby Kadkhodayan; Katgenahalli Y. Ramanujam; Biljana Mikijelj; Shanghua Wu

Archive | 2003

RF pulsing of a narrow gap capacitively coupled reactor

Peter Loewenhardt; Mukund Srinivasan; Andreas Fischer

Archive | 2007

Integrated capacitive and inductive power sources for a plasma etching chamber

Rajinder Dhindsa; Mukund Srinivasan; Kenji Takeshita; Alexei Marakhtanov; Andreas Fischer

Archive | 2001

Plasma processor in plasma confinement region within a vacuum chamber

Rajinder Dhindsa; Mukund Srinivasan; Eric Lenz; Lumin Li

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Collaboration

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Rajinder Dhindsa

Lam Research

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Eric Lenz

Lam Research

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Aaron Eppler

Lam Research

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Lumin Li

Lam Research

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Camelia Rusu

Lam Research

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Andreas Fischer

Lam Research

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Felix Kozakevich

Lam Research

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Eric Hudson

Lam Research

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Dave Trussell

Lam Research

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Jeffrey Marks

Lam Research

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