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Dive into the research topics where Manish Hemkar is active.

Publication


Featured researches published by Manish Hemkar.


Archive | 2011

Apparatus and methods for cyclical oxidation and etching

Udayan Ganguly; Joseph M. Ranish; Aaron Muir Hunter; Jing Tang; Christopher S. Olsen; Matthew D. Scotney-Castle; Vicky Nguyen; Swaminathan Srinivasan; Johanes F. Swenberg; Anchuan Wang; Nitin K. Ingle; Manish Hemkar; Jose Antonio Marin


Archive | 2005

Method and apparatus to control semiconductor film deposition characteristics

Satheesh Kuppurao; David K. Carlson; Manish Hemkar; Andrew Lam; Errol Antonio C. Sanchez; Howard Beckford


Archive | 2009

Apparatus to Control Semiconductor Film Deposition Characteristics

Satheesh Kuppurao; David K. Carlson; Manish Hemkar; Andrew Lam; Errol Antonio C. Sanchez; Howard Beckford


Archive | 2007

UV assisted low temperature epitaxial growth of silicon-containing films

Kaushal K. Singh; David K. Carlson; Manish Hemkar; Satheesh Kuppurao; Randhir Thakur


Archive | 2004

Low temperature epitaxial growth of silicon-containing films using UV radiation

Kaushal K. Singh; David K. Carlson; Manish Hemkar; Satheesh Kuppurao; Randhir Thakur


Archive | 2006

Low temperature epitaxial growth of silicon-containing films using close proximity UV radiation

Kaushal K. Singh; David K. Carlson; Manish Hemkar; Satheesh Kuppurao; Randhir Thakur


Archive | 2015

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK

Schubert S. Chu; Anhthu Ngo; Karthik Ramanathan; Nitin Pathak; Nyi O. Myo; Paul Brillhart; Richard O. Collins; Kevin Joseph Bautista; Edric Tong; Zhepeng Cong; Anzhong Chang; Kin Pong Lo; Manish Hemkar


Archive | 2011

Method of removing contaminants and native oxides from a substrate surface

Satheesh Kuppurao; Manish Hemkar; Vinh Tran; Yihwan Kim


Archive | 2005

Method to control semiconductor film deposition characteristics

Satheesh Kuppurao; David K. Carlson; Manish Hemkar; Andrew Lam; Errol Antonio C. Sanchez; Howard Beckford


Archive | 2011

Procédé d'élimination de contaminants et d'oxydes natifs d'une surface de substrat

Manish Hemkar; Yihwan Kim; Satheesh Kuppurao; Vinh Tran

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