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Marc A. Bergendahl

IBM

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Publication

Featured researches published by Marc A. Bergendahl.

Archive | 2014

Method of forming finfet of variable channel width

Marc A. Bergendahl; David Vaclav Horak; Shom Ponoth; Chih-Chao Yang; Charles W. Koburger

Archive | 2014

SELF-ALIGNED DIELECTRIC ISOLATION FOR FINFET DEVICES

Marc A. Bergendahl; Kangguo Cheng; David Vaclav Horak; Ali Khakifirooz; Shom Ponoth; Theodorus E. Standaert; Chih-Chao Yang; Charles W. Koburger; Xiuyu Cai; Ruilong Xie

Archive | 2012

SINGLE FIN CUT EMPLOYING ANGLED PROCESSING METHODS

Marc A. Bergendahl; David V. Horak; Charles W. Koburger; Shom Ponoth; Chih-Chao Yang

Archive | 2013

Metal alloy cap integration

Chih-Chao Yang; Marc A. Bergendahl; Steven J. Holmes; David V. Horak; Charles W. Koburger; Shom Ponoth

Archive | 2015

Sub-lithographic semiconductor structures with non-constant pitch

Marc A. Bergendahl; David V. Horak; Charles W. Koburger; Shom Ponoth; Chih-Chao Yang

Archive | 2013

Mask free protection of work function material portions in wide replacement gate electrodes

Charles W. Koburger; Marc A. Bergendahl; David V. Horak; Shom Ponoth; Chih-Chao Yang

Archive | 2009

Structure of UBM and solder bumps and methods of fabrication

Luc Belanger; Marc A. Bergendahl; Ajay P. Giri; Paul A. Lauro; Valerie Oberson; Da-Yuan Shih

Archive | 2013

Finfets and fin isolation structures

Marc A. Bergendahl; David V. Horak; Charles W. Koburger; Shom Ponoth; Chih-Chao Yang

Archive | 2016

SINGLE SPACER FOR COMPLEMENTARY METAL OXIDE SEMICONDUCTOR PROCESS FLOW

Marc A. Bergendahl; Kangguo Cheng; Jessica M. Dechene; Fee Li Lie; Eric R. Miller; Jeffrey Shearer; John R. Sporre; Sean Teehan

Archive | 2016

NANOSHEET CHANNEL-TO-SOURCE AND DRAIN ISOLATION

Marc A. Bergendahl; Kangguo Cheng; Fee Li Lie; Eric R. Miller; John R. Sporre; Sean Teehan

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Chih-Chao Yang

IBM

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Kangguo Cheng

IBM

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Shom Ponoth

IBM

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Charles W. Koburger

IBM

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Sean Teehan

IBM

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David V. Horak

IBM

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Fee Li Lie

IBM

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John R. Sporre

IBM

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Eric R. Miller

IBM

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J. Demarest

IBM

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