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Mark S. Chang

Advanced Micro Devices

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Publication

Featured researches published by Mark S. Chang.

Archive | 1994

Simplified dual damascene process for multi-level metallization and interconnection structure

Richard J. Huang; Angela Hui; Robin W. Cheung; Mark S. Chang; Ming-Ren Lin

Archive | 1994

Method of decreased interlayer dielectric constant in a multilayer interconnect structure to increase device speed performance

Mark S. Chang; Robin W. Cheung

Archive | 1996

Processing techniques for achieving production-worthy, low dielectric, low interconnect resistance and high performance ICS

Robin W. Cheung; Mark S. Chang

Archive | 1995

Processing techniques for achieving production-worthy, low dielectric, low dielectric, low interconnect resistance and high performance IC

Robin W. Cheung; Mark S. Chang

Archive | 2003

Polymer memory device formed in via opening

Nicholas H. Tripsas; Matthew S. Buynoski; Suzette K. Pangrle; Uzodinma Okoroanyanwu; Angela T. Hui; Christopher F. Lyons; Ramkumar Subramanian; Sergey Lopatin; Minh Van Ngo; Ashok M. Khathuria; Mark S. Chang; Patrick K. Cheung; Jane V. Oglesby

Archive | 2002

Methods of forming passive layers in organic memory cells

Ramkumar Subramanian; Jane V. Oglesby; Sergey Lopatin; Mark S. Chang; Christopher F. Lyons; James J. Xie; Minh Van Ngo

Archive | 1998

PROCESS FOR FABRICATING AN INTEGRATED CIRCUIT WITH A SELF-ALIGNED CONTACT

Hung-Sheng Chen; Unsoon Kim; Y U Sun; Chi Chang; Mark T. Ramsbey; Mark W. Randolph; Tatsuya Kajita; Angela Hui; Fei Wang; Mark S. Chang

Archive | 2002

RELACS shrink method applied for single print resist mask for LDD or buried bitline implants using chemically amplified DUV type photoresist

Kouros Ghandehari; Emmanuil H. Lingunis; Mark S. Chang; Angela Hui; Scott A. Bell; Jusuke Ogura

Archive | 2001

Formation of STI (shallow trench isolation) structures within core and periphery areas of flash memory device

Unsoon Kim; Mark S. Chang; Yider Wu; Chi Chang; Angela Hui; Yu Sun

Archive | 1999

Process for fabricating high density memory cells using a polysilicon hard mask

Bharath Rangarajan; David K. Foote; Fei Wang; Dawn M. Hopper; Stephen Keetai Park; Jack F. Thomas; Mark S. Chang; Mark T. Ramsbey

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Collaboration

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Robin W. Cheung

Advanced Micro Devices

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Angela T. Hui

Advanced Micro Devices

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Hao Fang

Advanced Micro Devices

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Angela Hui

Advanced Micro Devices

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Fei Wang

Spansion

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Minh Van Ngo

Advanced Micro Devices

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Michael K. Templeton

Advanced Micro Devices

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Mark T. Ramsbey

Advanced Micro Devices

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Ramkumar Subramanian

Michigan State University

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Scott A. Bell

Advanced Micro Devices

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