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Kenneth Tsai

Applied Materials

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Publication

Featured researches published by Kenneth Tsai.

Archive | 1999

Method for improved remote microwave plasma source for use with substrate processing system

Chien-Teh Kao; Kenneth Tsai; Quyen Pham; Ronald L. Rose; Calvin R. Augason; Joseph Yudovsky

Archive | 2000

Resonant chamber applicator for remote plasma source

Be Van Vo; Salvador P. Umotoy; Son Trinh; Lawrence Chung-Lai Lei; Sergio Edelstein; Avi Tepman; Chien-Teh Kao; Kenneth Tsai

Archive | 1997

Apparatus and method for delivering a gas

Joseph Yudovsky; Kenneth Tsai; Steve Ghanayem; Semyon Sherstinsky

Archive | 2004

Profile detection and refurbishment of deposition targets

Kenneth Tsai; Kenny King-Tai Ngan; Trung T. Doan

Archive | 2001

Monitoring an effluent from a chamber

Kenneth Tsai; Tung Bach; Quyen Pham

Archive | 1997

Apparatus for improved remote microwave plasma source for use with substrate processing systems

Chien-Teh Kao; Kenneth Tsai; Quyen Pham; Ronald L. Rose; Calvin R. Augason; Joseph Yudovsky

Archive | 2000

Apparatus and method for aligning and controlling edge deposition on a substrate

Kenneth Tsai; Joseph Yudovsky; Steve Ghanayem; Ken K. Lai; Patricia M. Liu; Toshiyuki Nakagawa; Maitreyee Mahajani

Archive | 2000

Apparatus and method for aligning a substrate on a support member

Joseph Yudovsky; Kenneth Tsai; Ilya Perlov; Eugene Gantvarg

Archive | 2002

Microwave heat shield for plasma chamber

Bo Zheng; Kenneth Tsai; Ken Kaung Lai

Archive | 2004

Chamber component having knurled surface

Kenneth Tsai; Abhijit Desai

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Collaboration

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Joseph Yudovsky

Applied Materials

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Quyen Pham

Applied Materials

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Calvin R. Augason

Applied Materials

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Chien-Teh Kao

Applied Materials

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Kenny King-Tai Ngan

Applied Materials

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Mark W. Curry

Applied Materials

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Peter I. Porshnev

Applied Materials

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Ronald L. Rose

Applied Materials

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Sebastien Raoux

Applied Materials

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Steve Ghanayem

Applied Materials

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