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Dive into the research topics where Martin Schoefthaler is active.

Publication


Featured researches published by Martin Schoefthaler.


Archive | 2000

Micromechanical spin angular acceleration sensor

Martin Schoefthaler; Harald Emmerich


Archive | 1999

Micromechanical magnetic field sensor

Martin Schoefthaler; Ralf Schellin; Harald Emmerich; Joerg Kaienburg


Archive | 1999

Micro-mechanical rotational acceleration sensor has an oscillating mass fixed at its center with an array of differential measurement capacitors for determination of acceleration directly rather than using time differentiation

Martin Schoefthaler; Harald Emmerich


Archive | 2006

Device for passivating at least one component by a housing and method for manufacturing a device

Kurt Weiblen; Martin Schoefthaler; Thomas Haalboom


Archive | 2001

Method and device for the electrical zero balancing for a micromechanical component

Leo Tanten; Jochen Franz; Martin Schoefthaler; Marius Rohr; Harald Emmerich; Matthias Maute; Thomas Walker


Archive | 1998

Micro-mechanical component

Martin Schoefthaler; Peter Hein; Helmut Skapa; Horst Muenzel


Archive | 2007

Device to passivate at least one component such as a position sensor has cover connected to front of carrier substrate to form an inner space and electrically isolated connection to the component

Kurt Weiblen; Martin Schoefthaler; Thomas Haalboom


Archive | 2001

Method and apparatus for electrical zero balancing for a micromechanical component

Leo Tanten; Jochen Franz; Martin Schoefthaler; Marius Rohr; Harald Emmerich; Matthias Haute; Thomas Walker


Archive | 2001

Verfahren und vorrichtung zum elektrischen nullpunktabgleich für ein mikromechanisches bauelement Method and device for electrical zero point adjustment for a micromechanical component

Leo Tanten; Jochen Franz; Martin Schoefthaler; Marius Rohr; Harald Emmerich; Matthias Haute; Thomas Walker


Archive | 2000

Verfahren und Vorrichtung zum elektrischen Nullpunktabgleich für ein mikromechanisches Bauelement Method and apparatus for electrical zero balancing for a micromechanical component

Leo Tanten; Jochen Franz; Martin Schoefthaler; Marius Rohr; Harald Emmerich; Matthias Maute; Thomas Walker

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