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Maruyama Tamotsu

Shin-Etsu Chemical

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Publication

Featured researches published by Maruyama Tamotsu.

Archive | 2002

PHASE SHIFT MASK BLANK, PHASE SHIFT MASK AND METHOD FOR PRODUCING PHASE SHIFT MASK

Okazaki Satoshi; Kaneko Ichiro; Moriya Jiro; Suzuki Masayuki; Maruyama Tamotsu

Archive | 2004

PHOTOMASK BLANK, PHOTOMASK AND METHOD OF SELECTING PHOTOMASK BLANK

Tsukamoto Tetsushi; Kaneko Hideo; Maruyama Tamotsu; Inazuki Sadaomi

Archive | 2002

SPUTTERING TARGET, ITS MANUFACTURING METHOD, AND METHOD FOR MANUFACTURING MASK BLANK USING IT

Watanabe Masataka; Koide Masayuki; Kaneko Hideo; Maruyama Tamotsu; Inazuki Sadaomi; Okazaki Satoshi

Archive | 2002

METHOD FOR FORMING CHROMIUM-BASED PHOTOMASK

Maruyama Tamotsu; Takano Shinichi; Kaneko Hideo; Shinagawa Tsutomu; Kojima Mikio; Okazaki Satoshi

Archive | 2003

STORING METHOD AND CONVEYING METHOD OF PHOTOMASK BLANK AND PHOTOMASK

Shinagawa Tsutomu; Maruyama Tamotsu; Moriya Jiro; Okazaki Satoshi

Archive | 2002

PHASE SHIFTING MASK BLANK, AND METHOD FOR PRODUCING PHASE SHIFTING MASK

Kaneko Hideo; Inazuki Sadaomi; Tsukamoto Tetsushi; Maruyama Tamotsu; Watanabe Masataka; Okazaki Satoshi

Archive | 2003

PHOTOMASK BLANK AND METHOD FOR REDUCING GENERATION OF PARTICLE IN PHOTOMASK BLANK

Kaneko Hideo; Inazuki Sadaomi; Tsukamoto Tetsushi; Maruyama Tamotsu; Shinagawa Tsutomu; Okazaki Satoshi

Archive | 2003

COMPOSITION FOR FORMING METAL WIRING AND METHOD FOR FORMING THE METAL WIRING BY USING THE SAME

Kusaki Wataru; Okazaki Satoshi; Shimizu Takashi; Maruyama Tamotsu; Shinagawa Tsutomu

Archive | 2002

PHASE SHIFT TYPE PHOTOMASK BLANK AND PHASE SHIFT TYPE PHOTOMASK

Kaneko Hideo; Maruyama Tamotsu; Okazaki Satoshi

Archive | 2002

Phase shift mask blank substrate, phase shift mask, and method of manufacturing the same

Inazuki Yukio; Kaneko Hideo; Maruyama Tamotsu; Okazaki Satoshi

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Collaboration

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Okazaki Satoshi

Shin-Etsu Chemical

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Kaneko Hideo

Shin-Etsu Chemical

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Inazuki Yukio

Shin-Etsu Chemical

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Moriya Jiro

Shin-Etsu Chemical

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Kaneko Ichiro

Shin-Etsu Chemical

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Suzuki Masayuki

Shin-Etsu Chemical

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Watanabe Masataka

Shin-Etsu Chemical

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Kojima Mikio

Shin-Etsu Chemical

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