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Watanabe Masataka

Shin-Etsu Chemical

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Publication

Featured researches published by Watanabe Masataka.

Archive | 2003

SPUTTERING TARGET AND METHOD FOR PRODUCING PHASE SHIFTING MASK BLANK, AND PHASE SHIFTING MASK USING THE SAME

Tsukamoto Tetsushi; Shinagawa Tsutomu; Inazuki Sadaomi; Kaneko Hideo; Watanabe Masataka; Okazaki Satoshi

Archive | 2003

SPUTTERING TARGET, PHASE SHIFT MASK BLANK USING THIS SPUTTERING TARGET, AND METHOD OF MANUFACTURING PHASE SHIFT MASK

Shinagawa Tsutomu; Okazaki Satoshi; Inazuki Sadaomi; Kaneko Hideo; Watanabe Masataka

Archive | 2003

SQUARE SUBSTRATE GRINDING METHOD

Moriya Jiro; Watanabe Masataka; Okazaki Satoshi; Ozawa Hidekazu; Ishii Yu; Kojima Shiyunichirou

Archive | 2002

MAGNETRON SPUTTERING EQUIPMENT AND METHOD FOR MANUFACTURING PHOTOMASK BLANK THEREWITH

Watanabe Masataka; Okazaki Satoshi; Kaneko Hideo; Ohashi Takeshi; Kobayashi Hideki

Archive | 2002

CLEANING METHOD AND APPARATUS FOR PRECISION SUBSTRATE

Suzuki Masayuki; Nakatsu Masayuki; Tajika Atsushi; Watanabe Masataka; Okazaki Satoshi

Archive | 2002

SPUTTERING TARGET, ITS MANUFACTURING METHOD, AND METHOD FOR MANUFACTURING MASK BLANK USING IT

Watanabe Masataka; Koide Masayuki; Kaneko Hideo; Maruyama Tamotsu; Inazuki Sadaomi; Okazaki Satoshi

Archive | 2000

METHOD FOR PROCESSING OPTICAL FIBER PREFORM AND PROCESSING APPARATUS THEREFOR

Watanabe Masataka; Arisaka Isao; Hoshino Shoji; Yamamura Kazuichi; Shimada Tadakatsu; Hirasawa Hideo

Archive | 2003

QUADRILATERAL SUBSTRATE GRINDING DEVICE

Ozawa Hidekazu; Ishii Yu; Kojima Shiyunichirou; Moriya Jiro; Watanabe Masataka; Okazaki Satoshi

Archive | 2002

PHASE SHIFTING MASK BLANK, AND METHOD FOR PRODUCING PHASE SHIFTING MASK

Kaneko Hideo; Inazuki Sadaomi; Tsukamoto Tetsushi; Maruyama Tamotsu; Watanabe Masataka; Okazaki Satoshi

Archive | 2003

Phase shift mask blank, phase shift mask, and methods of manufacturing the same

Watanabe Masataka; Inazuki Yukio; Kaneko Hideo; Kojima Mikio; Okazaki Satoshi

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Collaboration

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Okazaki Satoshi

Shin-Etsu Chemical

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Hirasawa Hideo

Shin-Etsu Chemical

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Kaneko Hideo

Shin-Etsu Chemical

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Shimada Tadakatsu

Shin-Etsu Chemical

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Moriya Jiro

Shin-Etsu Chemical

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Suzuki Shinji

Shin-Etsu Chemical

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Maruyama Tamotsu

Shin-Etsu Chemical

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Nagao Takaaki

Shin-Etsu Chemical

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Hatayama Kazuhisa

Shin-Etsu Chemical

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Inazuki Yukio

Shin-Etsu Chemical

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