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Ohashi Masaki

Shin-Etsu Chemical

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Publication

Featured researches published by Ohashi Masaki.

Archive | 2008

Positive resist material and pattern forming method

Nishi Tsunehiro; Kanao Go; Ohashi Masaki; Hasegawa Koji; Iio Tadashi

Archive | 2013

RESIST COMPOSITION AND METHOD FOR FORMING PATTERN

Hatakeyama Jun; Ohashi Masaki; Sagehashi Masayoshi

Archive | 2013

Photoacid generator, chemically amplified resist material, and patterning process

Ohashi Masaki; Kobayashi Tomohiro; Sagehashi Masayoshi

Archive | 2012

RESIST COMPOSITION AND PATTERNING METHOD USING THE SAME

Nagasawa Takayuki; Kobayashi Tomohiro; Taniguchi Ryosuke; Ohashi Masaki

Archive | 2009

HYDROXY-CONTAINING MONOMER, POLYMER COMPOUND, RESIST MATERIAL, AND PATTERNING METHOD

Kanao Go; Ohashi Masaki; Hasegawa Koji; Watanabe Takeshi

Archive | 2013

CHEMICALLY AMPLIFIED POSITIVE RESIST MATERIAL FOR ArF LIQUID IMMERSION EXPOSURE AND PATTERN FORMING PROCESS

Osawa Yoichi; Ohashi Masaki; Sasami Takeshi; Hatakeyama Jun

Archive | 2012

POSITIVE RESIST COMPOSITION AND PATTERN FORMATION METHOD

Taniguchi Ryosuke; Kobayashi Tomohiro; Nagasawa Takayuki; Ohashi Masaki

Archive | 2012

POLYMER COMPOUND CONTAINING SULFONIUM SALT, RESIST MATERIAL, PATTERN FORMING METHOD, SULFONIUM SALT MONOMER, AND MANUFACTURING METHOD THEREFOR

Osawa Yoichi; Ohashi Masaki; Tachibana Seiichiro; Hatakeyama Jun

Archive | 2008

POLYMERIZABLE ESTER COMPOUND, POLYMER, RESIST MATERIAL, AND PATTERN FORMATION METHOD

Watanabe Takeshi; Kanou Takeshi; Hasegawa Koji; Tachibana Seiichiro; Ohashi Masaki

Archive | 2015

SULFONIUM SALT, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERN FORMING METHOD

Ohashi Masaki; Fukushima Masahiro; Kobayashi Tomohiro; Taniguchi Ryosuke

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Collaboration

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Hatakeyama Jun

Shin-Etsu Chemical

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Hasegawa Koji

Shin-Etsu Chemical

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Tachibana Seiichiro

Shin-Etsu Chemical

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Kinsho Takeshi

Shin-Etsu Chemical

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Sagehashi Masayoshi

Shin-Etsu Chemical

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Kobayashi Tomohiro

Shin-Etsu Chemical

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Nishi Tsunehiro

Shin-Etsu Chemical

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Watanabe Satoshi

Shin-Etsu Chemical

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Watanabe Takeru

Shin-Etsu Chemical

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Kotake Masaaki

Shin-Etsu Chemical

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