Matthias Hierlemann

Semiconductor device with a buried gate and method of forming the same

Piezoelectric stress liner for bulk and SOI

Method and apparatus for semiconductor device fabrication using a reconstituted wafer

Implantation process in semiconductor fabrication

Field-effect transistor structure and associated semiconductor memory cell

Capacitors and methods of manufacture thereof

Buried gate transistor

Via density rules

Method and Apparatus For Manufacturing A Semiconductor

Production of a semiconductor structure used in the production of planar logic transistors comprises applying gate stacks onto a gate dielectric over a semiconductor substrate, implanting a dopant, and forming a side wall oxide