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Matthias Lipinski

Infineon Technologies

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Publication

Featured researches published by Matthias Lipinski.

Archive | 2002

Hardmask of amorphous carbon-hydrogen (a-C:H) layers with tunable etch resistivity

Matthias Lipinski

Archive | 2007

Process for generating a hard mask for the patterning of a layer

Matthias Lipinski

Archive | 2004

Hartmaske aus amorphen Kohlenstoff-Wasserstoff-Schichten

Matthias Lipinski

Archive | 2001

Tungsten hard mask

George Stojakovic; Matthias Lipinski

Archive | 2010

Metrology systems and methods for lithography processes

Chandrasekhar Sarma; Jingyu Lian; Matthias Lipinski; Haoren Zhuang

Archive | 2008

Threshold Voltage Consistency and Effective Width in Same-Substrate Device Groups

Roland Hampp; Manfred Eller; Jin-Ping Han; Matthias Lipinski

Archive | 2003

System and method for performing a metal layer RIE process

George Stojakovic; Matthias Lipinski

Archive | 2006

Process control systems and methods

Haoren Zhuang; Chandrasekhar Sarma; Matthias Lipinski; Jingyu Lian; Alois Gutmann

Archive | 2010

Method for Manufacturing a Semiconductor Device Having Doped and Undoped Polysilicon Layers

Haoren Zhuang; Matthias Lipinski; Jingyu Lian; Chandrasekhar Sarma

Archive | 2010

Feature Dimension Control in a Manufacturing Process

Haoren Zhuang; Alois Gutmann; Matthias Lipinski; Chandrasekhar Sarma; Jingyu Lian

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Chandrasekhar Sarma

Infineon Technologies

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Haoren Zhuang

Infineon Technologies

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Jingyu Lian

Infineon Technologies

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Alois Gutmann

Infineon Technologies

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George Stojakovic

Infineon Technologies

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Jin-Ping Han

Infineon Technologies

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Manfred Eller

Infineon Technologies

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Roland Hampp

Infineon Technologies

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