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Yutaka Ohmoto

Hitachi

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Publication

Featured researches published by Yutaka Ohmoto.

Archive | 2004

Etching method of organic insulating film

Michinobu Mizumura; Ryooji Fukuyama; Yutaka Ohmoto; Katsuya Watanabe

Archive | 2002

Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield

Yutaka Ohmoto; Hironobu Kawahara; Ken Yoshioka; Kazue Takahashi; Saburou Kanai

Archive | 2010

Plasma processing apparatus and sample stage

Tomoyuki Watanabe; Mamoru Yakushiji; Yutaka Ohmoto

Archive | 2004

Plasma etching apparatus and plasma etching method

Mamoru Yakushiji; Yutaka Ohmoto; Ryooji Fukuyama; Katsuya Watanabe

Archive | 2003

Method of dry etching a sample and dry etching system

Yutaka Ohmoto; Ryouji Fukuyama; Mamoru Yakushiji

Archive | 2002

Etching processing method

Yutaka Ohmoto; Ryouji Fukuyama; Mamoru Yakushiji; Michinobu Mizumura

Archive | 1994

Plasma-processing method and an apparatus for carrying out the same

Yutaka Ohmoto; Ryooji Fukuyama; Makoto Nawata

Archive | 2008

MANUFACTURING METHOD IN PLASMA PROCESSING APPARATUS

Yutaka Kouzuma; Yutaka Ohmoto; Mamoru Yakushiji; Ken Yoshioka; Tsunehiko Tsubone

Archive | 2014

Plasma processing apparatus and sample stage thereof

Hironori Kusumoto; Yutaka Ohmoto; Kazunori Nakamoto; Koji Nagai

Archive | 2003

Etching aftertreatment method

Michinobu Mizumura; Ryouji Fukuyama; Mamoru Yakushiji; Yutaka Ohmoto; Katsuya Watanabe

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Collaboration

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Mamoru Yakushiji

Hitachi

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Ken Yoshioka

Hitachi

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Michinobu Mizumura

Hitachi

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Ryooji Fukuyama

Hitachi

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Ryouji Fukuyama

Hitachi

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Hironobu Kawahara

Hitachi

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Kazue Takahashi

Hitachi

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Saburou Kanai

Hitachi

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Katsuya Watanabe

Hitachi

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Hironori Kusumoto

Hitachi

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