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Dive into the research topics where Xiaoxiong Yuan is active.

Publication


Featured researches published by Xiaoxiong Yuan.


Archive | 2001

Chamber hardware design for titanium nitride atomic layer deposition

Anh N. Nguyen; Steve H. Chiao; Xiaoxiong Yuan; Lawrence Lei; Ming Xi; Michael Yang; Sean M. Seutter; Toshio Itoh


Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan


Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 2003

Cyclical layer deposition system

Michael Yang; Joseph Yudovsky; Hyungsuk Alexander Yoon; Xiaoxiong Yuan


Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 2005

Apparatus for generating plasma by RF power

Yu Chang; Gwo-Chuan Tzu; Salvador P. Umotoy; Chien-Teh Kao; William Kuang; Xiaoxiong Yuan; Mei Chang


Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 2000

Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces

Salvador P. Umotoy; Vincent Ku; Xiaoxiong Yuan; Lawrence Chung-Lai Lei


Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 2001

Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films

Anh N. Nguyen; Michael Yang; Ming Xi; Hua Chung; Anzhong Chang; Xiaoxiong Yuan; Siqing Lu

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