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Xiaoxiong Yuan

Applied Materials

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Publication

Featured researches published by Xiaoxiong Yuan.

Archive | 2001

Chamber hardware design for titanium nitride atomic layer deposition

Anh N. Nguyen; Steve H. Chiao; Xiaoxiong Yuan; Lawrence Lei; Ming Xi; Michael Yang; Sean M. Seutter; Toshio Itoh

Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2003

Cyclical layer deposition system

Michael Yang; Joseph Yudovsky; Hyungsuk Alexander Yoon; Xiaoxiong Yuan

Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Apparatus for generating plasma by RF power

Yu Chang; Gwo-Chuan Tzu; Salvador P. Umotoy; Chien-Teh Kao; William Kuang; Xiaoxiong Yuan; Mei Chang

Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2000

Dispersion plate for flowing vaporizes compounds used in chemical vapor deposition of films onto semiconductor surfaces

Salvador P. Umotoy; Vincent Ku; Xiaoxiong Yuan; Lawrence Chung-Lai Lei

Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2001

Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films

Anh N. Nguyen; Michael Yang; Ming Xi; Hua Chung; Anzhong Chang; Xiaoxiong Yuan; Siqing Lu

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Collaboration

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Yu Chang

Applied Materials

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Chien-Teh Kao

Applied Materials

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Mei Chang

Applied Materials

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Sal Umotoy

Applied Materials

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Joel M. Huston

Applied Materials

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Chiukin Lai

Applied Materials

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Gwo-Chuan Tzu

Applied Materials

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See-Eng Phan

Applied Materials

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Son Trinh

Applied Materials

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Xinliang Lu

Applied Materials

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