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Dive into the research topics where Russell C. Ellwanger is active.

Publication


Featured researches published by Russell C. Ellwanger.


Archive | 2003

Multi-chemistry plating system

Michael X. Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher; Bernardo Donoso; Lily L. Pang; Svetlana Sherman; Henry Ho; Anh N. Nguyen; Alexander N. Lerner; Allen L. D'Ambra; Arulkumar Shanmugasundram; Tetsuya Ishikawa; Yevgeniy Rabinovich; Dmitry Lubomirsky; Yeuk-Fai Edwin Mok; Son T. Nguyen


Archive | 1999

Integrated temperature controlled exhaust and cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen


Archive | 1999

Wafer pedestal with a purge ring

Keith K. Koai; Lawrence Chung-Lai Lei; Russell C. Ellwanger


Archive | 2003

Multi-chemistry electrochemical processing system

Michael X Yang; Ming Xi; Russell C. Ellwanger; Eric B. Britcher


Archive | 1998

Chemical vapor deposition hardware and process

Xin Sheng Guo; Mohan K. Bhan; Justin Jones; Lawrence Lei; Russell C. Ellwanger; Mei Chang; Ashok K. Sinha; Avi Tepman


Archive | 1999

METHOD FOR PERFORMING METALLO-ORGANIC CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE AT REDUCED TEMPERATURE

Shulin Wang; Huan Luo; Keith K. Koai; Ming Xi; Mei Chang; Russell C. Ellwanger


Archive | 1999

METHOD OF DEPOSITING A THICK TITANIUM NITRIDE FILM

Shulin Wang; Ming Xi; Frederick Wu; Ramanujapuram A. Srinivas; Yehuda Demayo; Zvi Lando; Mei Chang; Russell C. Ellwanger


Archive | 2000

Cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen


Archive | 2000

METALLIC ORGANIC CHEMICAL VAPOR DEPOSITION METHOD FOR NITRIDE TITANIUM IN LOWERED TEMPERATURE

Mei Chang; Russell C. Ellwanger; Ruo Fuan; K Koai Keith; Shi Min; Shulin Wang; ケイ. コアイ キース; ワン シュリン; ルオ フアン; シ ミン; チャン メイ; シー. エルワンガー ラッセル


Archive | 2000

Gate valve for an integrated temperature controlled exhaust and cold trap assembly

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Russell C. Ellwanger; Ronald L. Rose; Joel M. Huston; James Jin-Long Chen

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