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Mitsumasa Koyanagi

Tokyo Electron

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Publication

Featured researches published by Mitsumasa Koyanagi.

Archive | 2010

Method and apparatus for manufacturing three-dimensional integrated circuit

Mitsumasa Koyanagi; Takafumi Fukushima; Masahiko Sugiyama

Archive | 2012

Method of manufacturing semiconductor device with three-dimensional lamination structure

Mitsumasa Koyanagi; 光正 小柳

Archive | 2009

Collectively holding tray and three-dimensionally integrated circuit manufacturing apparatus

Takashi Fukushima; Mitsumasa Koyanagi; Masahiko Sugiyama; 光正 小柳; 雅彦 杉山; 誉史 福島

Proceedings of the IEEE | 2009

High-Density Through Silicon Vias for 3-D LSIs : Silicon stacked chips that perform highly-parallel data transfer have been successfully fabricated for image processing, artificial retinas, and for microprocessor and memory testing

Mitsumasa Koyanagi; Takafumi Fukushima; Tetsu Tanaka

PRiME 2016/230th ECS Meeting (October 2-7, 2016) | 2016

(Invited) Self-Assembly Based Multichip-to-Wafer Bonding Technologies for 3D/Hetero Integration

Takafumi Fukushima; Kang Wook Lee; Tetsu Tanaka; Mitsumasa Koyanagi

Proceedings of the Society Conference of IEICE | 2015

CK-2-5 Parallel Information Processing Using 3D Reconfigurable LSI

Mitsumasa Koyanagi; Tetsu Tanaka

223rd ECS Meeting (May 12-17, 2013) | 2013

Invited) Challenges in 3D Integration

Mitsumasa Koyanagi; Kang Wook Lee; Takafumi Fukushima; Tetsu Tanaka

Meeting Abstracts | 2012

New 3D LSIs Using Si Compatible Materials, Processes and Technologies

Mitsumasa Koyanagi; Kang Wook Lee; Takafumi Fukushima; Tetsu Tanaka

Archive | 2011

Advanced Die-to-Wafer 3D Integration Platform

Takafumi Fukushima; Kang Wook Lee; Tetsu Tanaka; Mitsumasa Koyanagi

Archive | 2010

Method and apparatus for producing three-dimensional integrated circuit

Mitsumasa Koyanagi; 小柳 光正; Takafumi Fukushima; 誉史 福島; Masahiko Sugiyama; 杉山 雅彦

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Collaboration

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Takafumi Fukushima

Tokyo Electron

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Tetsu Tanaka

Tohoku University

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Kang Wook Lee

Tohoku University

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Masahiko Sugiyama

Kyushu University

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Bea Jicheol

Tohoku University

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Eriko Sugano

Iwate University

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Hajime Mushiake

Tohoku University

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Hiroshi Tomita

Iwate University

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Hiroyuki Kurino

Tohoku University

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K. Kiyoyama

Tohoku University

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