Mitsunori Nakatani
Mitsubishi
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Publication
Featured researches published by Mitsunori Nakatani.
Japanese Journal of Applied Physics | 1995
Mitsunori Nakatani; Yoshiki Kojima; Hirofumi Nakano; Kazuya Kamon; Kazuhiko Sato; Hirozou Takano; Osamu Ishihara
In edge-line phase-shift lithography, asymmetrical resist patterns formed by both sides of shifter edges have been observed in the case of a narrow shifter. The effect of phase error, shifter width and shifter edge angle on resist pattern profiles has been investigated by simulations and experiments. It has been confirmed that the asymmetry of resist patterns is mainly due to the coma aberration of the stepper projection lens and is enhanced as the shifter width becomes narrower. The effect of decreasing the shifter edge angle has proved to be equivalent to the effect of narrowing the effective shifter width.
Archive | 1991
Takayuki Fujii; Mitsunori Nakatani
Archive | 1991
Mitsunori Nakatani
Archive | 1993
Mitsunori Nakatani
Archive | 2002
Shoichi Karakida; Takuya Konno; Hiroaki Morikawa; Mitsunori Nakatani; Takahiko Nishida; 光徳 中谷; 卓哉 今野; 昇市 唐木田; 浩昭 森川; 隆彦 西田
Archive | 1997
Mitsunori Nakatani; Hirofumi Nakano
Archive | 1991
Mitsunori Nakatani
Archive | 1994
Mitsunori Nakatani; Yoshiki Kojima; Hiroyuki Minami
Archive | 1993
Mitsunori Nakatani; Yoshiki Kojima; Hiroyuki Minami
Archive | 2008
Shoichi Karakida; Takahiko Nishida; Mitsunori Nakatani; Hiroaki Morikawa
