Nicolas Daval
ASM International
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Featured researches published by Nicolas Daval.
Meeting Abstracts | 2006
Yann Bogumilowicz; Jean-Paul Barnes; P. Holliger; Denis Rouchon; Nicolas Daval; Jean-Michel Hartmann; Alexandra Abbadie; Fabrice Lallemand; Eric Guiot; Takeshi Akatsu; Chrystel Deguet; N. Kernevez
We have studied the Ge diffusion in strained silicon (sSi) layers deposited on SiGe virtual substrates. Two Ge concentrations have been used to induce strain in the Si layers: 30 and 40%, corresponding to a 1.8 and 2.5 GPa strain level respectively. Ge diffusion in highly strained layers has been understudied, whereas these layers are of great interest since they allow mobility gains for both electrons and holes. Therefore, quantifying the impact of Ge diffusion within the sSi layer (sSi consumption, Ge doping and piling...) is of great importance if one wants to use such layers for CMOS transistors or for the realization of strained Silicon On Insulator wafers using the SmartCut technology. The samples consist in a deposited SiO2 / sSi / relaxed SiGe / graded buffer / Si substrate stack. Thermal treatments have been performed in a horizontal furnace with temperatures ranging from 750 up to 1000°C. The Ge diffusion in sSi has been characterized by Secondary Ion Mass Spectrometry (SIMS). Figure 1 shows the Ge concentration depth profile in a sSi layer deposited on relaxed Si0.7Ge0.3 for the various thermal treatments investigated.
Archive | 2006
Nicolas Daval; Sébastien Kerdiles; Cecile Aulnette
Archive | 2005
Takeshi Akatsu; Nicolas Daval; Nguyet-Phuong Nguyen; Olivier Rayssac; Konstantin Bourdelle
Archive | 2006
Nicolas Daval; Takeshi Akatsu; Nguyet-Phuong Nguyen
Archive | 2005
Nicolas Daval; Takeshi Akatsu; Nguyet-Phuong Nguyen; Olivier Rayssac
Archive | 2007
Konstantin Bourdelle; Nicolas Daval; Ian Cayrefourcq; Steven R. A. Van Aerde; Marinus J. De Blank; Cornelius A. van der Jeugd
Archive | 2005
Bruno Ghyselen; Cecile Aulnette; Benedite Osternaud; Nicolas Daval
Archive | 2005
Nicolas Daval; Takeshi Akatsu; Nguyet-Phuong Nguyen
Archive | 2009
Nicolas Daval; Oleg Kononchuk; Eric Guiot; Cecile Aulnette; Fabrice Lallement; Christophe Figuet; Didier Landru
Archive | 2004
Nicolas Daval; Bruno Ghyselen; Cecile Aulnette; Olivier Rayssac; Ian Cayrefourcq