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Nicolas Gani

Applied Materials

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Publication

Featured researches published by Nicolas Gani.

Archive | 2002

Method and apparatus for tuning an RF matching network in a plasma enhanced semiconductor wafer processing system

Valentin N. Todorow; John Holland; Nicolas Gani

Archive | 2007

ETCHING AND PASSIVATING FOR HIGH ASPECT RATIO FEATURES

Rong Chen; Tae Won Kim; Nicolas Gani; Anisul Khan

Archive | 2006

Method for etching having a controlled distribution of process results

Thomas J. Kropewnicki; Theodoros Panagopoulos; Nicolas Gani; Wilfred Pau; Meihua Shen; John Holland

Archive | 2002

Methods for etching using building blocks

Farid Abooameri; Shashank C. Deshmukh; Meihua Shen; Stephanie S. Cheng; Nicolas Gani; Thorsten Lill

Archive | 2007

ETCHING OF SiO2 WITH HIGH SELECTIVITY TO Si3N4 AND ETCHING METAL OXIDES WITH HIGH SELECTIVITY TO SiO2 AT ELEVATED TEMPERATURES WITH BCl3 BASED ETCH CHEMISTRIES

Radhika Mani; Nicolas Gani; Wei Liu; Meihua Shen; Shashank C. Deshmukh

Archive | 2008

Multiple port gas injection system utilized in a semiconductor processing system

Edward P. Hammond; Rodolfo P. Belen; Nicolas Gani; Jing Zou; Meihua Shen; Michael D. Willwerth; David Palagashvili

Archive | 2002

High selectivity and residue free process for metal on thin dielectric gate etch application

Meihua Shen; Yan Du; Nicolas Gani; Oranna Yauw; Hakeem M. Oluseyi

Archive | 2008

Shallow trench isolation etch process

Hiroki Sasano; Meihua Shen; Radhika Mani; Sunil Srinivasan; Daehee Weon; Nicolas Gani; Shashank C. Deshmukh; Anisul Khan

Archive | 2003

Process for etching polysilicon gates with good mask selectivity, critical dimension control, and cleanliness

Songlin Xu; Thorsten Lill; Yeajer Arthur Chen; Mohit Jain; Nicolas Gani; Shing-li Sung; Jitske Kretz; Meihua Shen; Farid Abooameri

Archive | 2012

Methods for in-situ chamber clean utilized in an etching processing chamber

Noel Sun; Meihua Shen; Nicolas Gani; Chung Nang Liu; Radhika Mani

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Collaboration

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Meihua Shen

Lam Research

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Shashank C. Deshmukh

University of California

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Radhika Mani

Applied Materials

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John Holland

Applied Materials

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Thorsten Lill

Applied Materials

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Wilfred Pau

Applied Materials

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Anisul Khan

Applied Materials

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Theodoros Panagopoulos

Applied Materials

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Thomas J. Kropewnicki

Applied Materials

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David Palagashvili

Applied Materials

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