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Abhijit Basu Mallick

Applied Materials

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Publication

Featured researches published by Abhijit Basu Mallick.

Archive | 2010

High quality silicon oxide films by remote plasma CVD from disilane precursors

Abhijit Basu Mallick; Srinivas D. Nemani; Ellie Yieh

Archive | 2007

Method and system for improving dielectric film quality for void free gap fill

Abhijit Basu Mallick; Jeffrey C. Munro; Linlin Wang; Srinivas D. Nemani; Yi Zheng; Zheng Yuan; Dimitry Lubomirsky; Ellie Yieh

Archive | 2009

Wet oxidation process performed on a dielectric material formed from a flowable cvd process

Linlin Wang; Abhijit Basu Mallick; Nitin K. Ingle

Archive | 2007

Curing methods for silicon dioxide thin films deposited from alkoxysilane precursor with harp ii process

Abhijit Basu Mallick; Srinivas D. Nemani; Timothy W. Weidman

Archive | 2006

Formation of high quality dielectric films of silicon dioxide for STI: usage of different siloxane-based precursors for HARP II - remote plasma enhanced deposition processes

Abhijit Basu Mallick; Jeffrey C. Munro; Srinivas D. Nemani

Archive | 2009

Silicon-selective dry etch for carbon-containing films

Kedar Sapre; Jing Tang; Linlin Wang; Abhijit Basu Mallick; Nitin K. Ingle

Archive | 2012

Doping of dielectric layers

Brian Saxton Underwood; Nitin K. Ingle; Abhijit Basu Mallick

Archive | 2008

Methods for forming silicon nitride based film or silicon carbon based film

Abhijit Basu Mallick; Srinivas D. Nemani

Archive | 2012

ATOMIC LAYER DEPOSITION OF SILICON NITRIDE USING DUAL-SOURCE PRECURSOR AND INTERLEAVED PLASMA

Abhijit Basu Mallick

Archive | 2007

Methods for Forming a Silicon Oxide Layer Over a Substrate

Srinivas D. Nemani; Abhijit Basu Mallick; Ellie Yieh

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Nitin K. Ingle

Applied Materials

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Pramit Manna

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Yihong Chen

Applied Materials

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Brian Saxton Underwood

Applied Materials

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Kelvin Chan

Applied Materials

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Kiran V. Thadani

Applied Materials

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Linlin Wang

Applied Materials

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Mukund Srinivasan

Applied Materials

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Amit Chatterjee

Applied Materials

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