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Olkan Cuvalci

Applied Materials

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Publication

Featured researches published by Olkan Cuvalci.

Archive | 2008

Chemical precursor ampoule for vapor deposition processes

Olkan Cuvalci; Dien-Yeh Wu; Xiaoxiong Yuan

Archive | 2012

Substrate support with substrate heater and symmetric rf return

Yu Chang; Gwo-Chuan Tzu; Anqing Cui; William Kuang; Olkan Cuvalci

Archive | 2011

Methods and apparatus for thermal based substrate processing with variable temperature capability

Gwo-Chuan Tzu; Xiaoxiong Yuan; Amit Khandelwal; Benjamin Cheng Wang; Avgerinos V. Gelatos; Kai Wu; Michael P. Karazim; Jing Lin; Olkan Cuvalci

Archive | 2004

Heated ceramic substrate support with protective coating

Avgerinos V. Gelatos; Olkan Cuvalci; Tong Zhang; Chen-an Chen

Archive | 2012

APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL

Gwo-Chuan Tzu; Xiaoxiong Yuan; Amit Khandelwal; Avgerinos V. Gelatos; Olkan Cuvalci; Kai Wu; Michael P. Karazim

Archive | 2010

Substrate processing system and methods thereof

Wei Ti Lee; Lai Ta; Srinivas Guggilla; Kevin Moraes; Olkan Cuvalci; Regan Young; John Mazzocco

Archive | 2014

Apparatus And Methods For Symmetrical Gas Distribution With High Purge Efficiency

Chien-Teh Kao; Mei Chang; Hyman W. H. Lam; Joel M. Huston; Xiaoxiong Yuan; Olkan Cuvalci

Archive | 2008

PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUCCESSION OF VOLTAGE DROP ELEMENTS

Olkan Cuvalci; Yu Chang; William Kuang; Anqing Cui; Seshadri Ganguli

Archive | 2014

Heated substrate support with flatness control

Olkan Cuvalci; Gwo-Chuan Tzu; Xiaoxiong Yuan

Archive | 2014

SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP

Olkan Cuvalci; Joel M. Huston; Gwo-Chuan Tzu

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Collaboration

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Gwo-Chuan Tzu

Applied Materials

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Xiaoxiong Yuan

Applied Materials

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Joel M. Huston

Applied Materials

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Yu Chang

Applied Materials

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Avgerinos V. Gelatos

Applied Materials

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Michael P. Karazim

Applied Materials

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Amit Khandelwal

Applied Materials

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Anqing Cui

Applied Materials

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Chien-Teh Kao

Applied Materials

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Hyman W. H. Lam

Applied Materials

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