Gwo-Chuan Tzu | Researchain

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Featured researches published by Gwo-Chuan Tzu.

Archive | 2001

Lid assembly for a processing system to facilitate sequential deposition techniques

Gwo-Chuan Tzu; Salvador P. Umotoy

Archive | 2005

Apparatus for generating plasma by RF power

Yu Chang; Gwo-Chuan Tzu; Salvador P. Umotoy; Chien-Teh Kao; William Kuang; Xiaoxiong Yuan; Mei Chang

Archive | 2007

Self aligning non contact shadow ring process kit

Joseph Yudovsky; Lawrence C. Lei; Salvador P. Umotoy; Thomas A. Madar; Girish Dixit; Gwo-Chuan Tzu

Archive | 2008

PROCESS FOR TUNGSTEN NITRIDE DEPOSITION BY A TEMPERATURE CONTROLLED LID ASSEMBLY

Avgerinos V. Gelatos; Sang-Hyeob Lee; Xiaoxiong Yuan; Salvador P. Umotoy; Yu Chang; Gwo-Chuan Tzu; Emily Renuart; Jing Lin; Wing-Cheong Lai; Sang Q. Le

Archive | 2008

Temperature controlled lid assembly for tungsten nitride deposition

Avgerinos V. Gelatos; Sang-Hyeob Lee; Xiaoxiong Yuan; Salvador P. Umotoy; Yu Chang; Gwo-Chuan Tzu; Emily Renuart; Jing Lin; Wing-Cheong Lai; Sang Q. Le

Archive | 2012

Substrate support with substrate heater and symmetric rf return

Yu Chang; Gwo-Chuan Tzu; Anqing Cui; William Kuang; Olkan Cuvalci

Archive | 2011

Methods and apparatus for thermal based substrate processing with variable temperature capability

Gwo-Chuan Tzu; Xiaoxiong Yuan; Amit Khandelwal; Benjamin Cheng Wang; Avgerinos V. Gelatos; Kai Wu; Michael P. Karazim; Jing Lin; Olkan Cuvalci

Archive | 2000

Self-aligning noncontact shadow ring processing kit

Girish Dixit; Lawrence C. Lei; Thomas A. Madar; Gwo-Chuan Tzu; Salvador P. Umotoy; Joseph Yudovsky; ディグジットギリッシュ; チュアンツーグォウ; ウモトイサルバドール; ユドブスキジョセフ; エーマダートーマス; シーレイローレンス

Archive | 2012