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Patrick Reilly

Applied Materials

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Publication

Featured researches published by Patrick Reilly.

Archive | 2010

Pecvd multi-step processing with continuous plasma

Martin Jay Seamons; Sum-Yee Betty Tang; Michael H. Lin; Patrick Reilly; Sudha Rathi

Archive | 2011

Confined process volume pecvd chamber

Ramprakash Sankarakrishnan; Ganesh Balasubramanian; Juan Carlos Rocha-Alvarez; Dale R. Du Bois; Mark Fodor; Jianhua Zhou; Amit Kumar Bansal; Mohamad A. Ayoub; Shahid Shaikh; Patrick Reilly; Deenesh Padhi; Thomas Nowak

Archive | 2013

ZERO SHRINKAGE SMOOTH INTERFACE OXY-NITRIDE AND OXY-AMORPHOUS-SILICON STACKS FOR 3D MEMORY VERTICAL GATE APPLICATION

Xinhai Han; Nagarajan Rajagopalan; Guangchi Xuan; Jianhua Zhou; Jigang Li; Shahid Shaikh; Patrick Reilly; Thomas Nowak; Juan Carlos Rocha-Alvarez; Heung Lak Park; Bok Hoen Kim

Archive | 2012

Deposition of an amorphous carbon layer with high film density and high etch selectivity

Patrick Reilly; Shahid Shaikh; Tersem Summan; Deenesh Padhi; Sanjeev Baluja; Juan Carlos Rocha-Alvarez; Thomas Nowak; Bok Hoen Kim

Archive | 2010

PLANARIZING ETCH HARDMASK TO INCREASE PATTERN DENSITY AND ASPECT RATIO

Martin Jay Seamons; Kwangduk Douglas Lee; Chiu Chan; Patrick Reilly; Sudha Rathi

Archive | 2014

ULTRA-CONFORMAL CARBON FILM DEPOSITION LAYER-BY-LAYER DEPOSITION OF CARBON-DOPED OXIDE FILMS

Swayambhu P. Behera; Shahid Shaikh; Pramit Manna; Mandar B. Pandit; Tersem Summan; Patrick Reilly; Deenesh Padhi; Bok Hoen Kim; Heung Lak Park

Archive | 2016

PULSED NITRIDE ENCAPSULATION

Patrick Reilly; David Alan Bethke; Mihaela Balseanu

Archive | 2013

PECVD APPARATUS AND PROCESS

Nagarajan Rajagopalan; Xinhai Han; Michael Wenyoung Tsiang; Masaki Ogata; Zhijun Jiang; Juan Carlos Rocha-Alvarez; Thomas Nowak; Jianhua Zhou; Ramprakash Sankarakrishnan; Ganesh Balasubramanian; Amit Kumar Bansal; Jeongmin Lee; Todd Egan; Edward W. Budiarto; Dmitriy Panasyuk; Terrance Y. Lee; Jian J. Chen; Mohamad A. Ayoub; Heung Lak Park; Patrick Reilly; Shahid Shaikh; Bok Hoen Kim; Sergey Starik

Archive | 2017

ULTRA-CONFORMAL CARBON FILM DEPOSITION

Swayambhu P. Behera; Shahid Shaikh; Pramit Manna; Mandar B. Pandit; Tersem Summan; Patrick Reilly; Deenesh Padhi; Bok Hoen Kim; Heung Lak Park

Archive | 2016

Method of forming planar carbon layer by applying plasma power to a combination of hydrocarbon precursor and hydrogen-containing precursor

Patrick Reilly; David Alan Bethke; Kwangduk Douglas Lee

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Shahid Shaikh

Applied Materials

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Bok Hoen Kim

Applied Materials

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Deenesh Padhi

Applied Materials

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Heung Lak Park

Applied Materials

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Tersem Summan

Applied Materials

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Juan Carlos Rocha-Alvarez

Applied Materials

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Mandar B. Pandit

Applied Materials

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Pramit Manna

Applied Materials

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Swayambhu P. Behera

Applied Materials

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Thomas Nowak

Applied Materials

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