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Dive into the research topics where Mandar B. Pandit is active.

Publication


Featured researches published by Mandar B. Pandit.


Archive | 2015

Titanium nitride removal

Xikun Wang; Mandar B. Pandit; Anchuan Wang; Nitin K. Ingle


Archive | 2014

FLUORINE-BASED HARDMASK REMOVAL

Mandar B. Pandit; Xikun Wang; Zhenjiang Cui; Mikhail Korolik; Anchuan Wang; Nitin K. Ingle


Archive | 2015

Self-aligned process

Mandar B. Pandit; Anchuan Wang; Nitin K. Ingle


Archive | 2013

Methods for patterning a hardmask layer for an ion implantation process

Bingxi Wood; Li Yan Miao; Huixiong Dai; Adam Brand; Yongmei Chen; Mandar B. Pandit; Qingjun Zhou


Archive | 2014

ULTRA-CONFORMAL CARBON FILM DEPOSITION LAYER-BY-LAYER DEPOSITION OF CARBON-DOPED OXIDE FILMS

Swayambhu P. Behera; Shahid Shaikh; Pramit Manna; Mandar B. Pandit; Tersem Summan; Patrick Reilly; Deenesh Padhi; Bok Hoen Kim; Heung Lak Park


Archive | 2010

REMOTE HYDROGEN PLASMA SOURCE OF SILICON CONTAINING FILM DEPOSITION

Zheng Yuan; Mandar B. Pandit; Francimar Schmitt; Yi Zheng; Fan Yang; Lipan Li; Alan Tso; Dustin W. Ho; Tom K. Cho; Randhir Thakur


Archive | 2016

Gas flow profile modulated control of overlay in plasma cvd films

Prashant Kumar Kulshreshtha; Sudha Rathi; Praket P. Jha; Saptarshi Basu; Kwangduk Douglas Lee; Martin Jay Seamons; Bok Hoen Kim; Ganesh Balasubramanian; Ziqing Duan; Lei Jing; Mandar B. Pandit


Archive | 2017

ULTRA-CONFORMAL CARBON FILM DEPOSITION

Swayambhu P. Behera; Shahid Shaikh; Pramit Manna; Mandar B. Pandit; Tersem Summan; Patrick Reilly; Deenesh Padhi; Bok Hoen Kim; Heung Lak Park


Archive | 2015

Processus auto-aligné

Mandar B. Pandit; Anchuan Wang; Nitin K. Ingle


Archive | 2014

METHODS FOR REMOVING CARBON CONTAINING FILMS

Wei Liu; Naomi Yoshida; Mandar B. Pandit

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