Pramit Manna | Researchain

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Featured researches published by Pramit Manna.

Archive | 2014

Development of high etch selective hardmask material by ion implantation into amorphous carbon films

Pramit Manna; Abhijit Basu Mallick; Ludovic Godet; Yongmei Chen; Jun Xue; Mukund Srinivasan; Ellie Yieh; Srinivas D. Nemani

Archive | 2014

ULTRA-CONFORMAL CARBON FILM DEPOSITION LAYER-BY-LAYER DEPOSITION OF CARBON-DOPED OXIDE FILMS

Swayambhu P. Behera; Shahid Shaikh; Pramit Manna; Mandar B. Pandit; Tersem Summan; Patrick Reilly; Deenesh Padhi; Bok Hoen Kim; Heung Lak Park

Archive | 2013

CONFORMAL SACRIFICIAL FILM BY LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION TECHNIQUE

Jingjing Xu; Joe Griffith Cruz; Pramit Manna; Deenesh Padhi; Bok Hoen Kim; Barry L. Chin

Archive | 2015

Deposition of metal doped amorphous carbon film

Pramit Manna; Abhijit Basu Mallick; Mukund Srinivasan; Rui Cheng

Archive | 2015

CLEANING PROCESS FOR CLEANING AMORPHOUS CARBON DEPOSITION RESIDUALS USING LOW RF BIAS FREQUENCY APPLICATIONS

Pramit Manna; Prashant Kumar Kulshreshtha; Kwangduk Douglas Lee; Martin Jay Seamons; Abhijit Basu Mallick; Bok Hoen Kim; Mukund Srinivasan

Archive | 2016

METHOD FOR CRITICAL DIMENSION REDUCTION USING CONFORMAL CARBON FILMS

Bencherki Mebarki; Bok Hoen Kim; Deenesh Padhi; Li Yan Miao; Pramit Manna; Christopher Dennis Bencher; Mehul Naik; Huixiong Dai; Christopher S. Ngai; Daniel Lee Diehl

Archive | 2015

Low temperature cure modulus enhancement

Pramit Manna; Kiran V. Thadani; Abhijit Basu Mallick

Archive | 2014

Deposition of heteroatom-doped carbon films

Pramit Manna; Abhijit Basu Mallick; Mukund Srinivasan

Archive | 2014

ULTRA-THIN STRUCTURE TO PROTECT COPPER AND METHOD OF PREPARATION

Amit Chatterjee; Geetika Bajaj; Pramit Manna; He Ren; Tapash Chakraborty; Srinivas D. Nemani; Mehul Naik; Robert Jan Visser; Abhijit Basu Mallick

Archive | 2014

Deposition of dielectric films

Yihong Chen; Shaunak Mukherjee; Amit Chatterjee; Pramit Manna; Abhijit Basu Mallick; Ningli Liu; Jianhua Zhou; Juan Carlos Rocha-Alvarez; Mukund Srinivasan

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