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Paul B. Reuter

Applied Materials

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Publication

Featured researches published by Paul B. Reuter.

Archive | 2012

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

Jared Ahmad Lee; Martin Jeffrey Salinas; Paul B. Reuter; Imad Yousif; Aniruddha Pal

Archive | 2014

Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations

Paul B. Reuter; Ganesh Balasubramanian; JuanCarlos Rocha-Alvarez; Jeffrey Barrett Robinson; Dale R. Du Bois; Paul Connors

Archive | 2012

METHOD AND APPARATUS FOR SUBSTRATE TRANSFER AND RADICAL CONFINEMENT

Jared Ahmad Lee; Martin Jeff Salinas; Paul B. Reuter; Imad Yousif; Aniruddha Pal

Archive | 2014

PROCESSING SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING

Steve S. Hongkham; Paul B. Reuter; Eric A. Englhardt; Ganesh Balasubramanian; Xinglong Chen; JuanCarlos Rocha-Alvarez

Archive | 2012

Thin heated substrate support

Imad Yousif; Martin Jeffrey Salinas; Paul B. Reuter; Aniruddha Pal; Jared Ahmad Lee

Archive | 2012

VACUUM CHAMBERS WITH SHARED PUMP

Aniruddha Pal; Martin Jeffrey Salinas; Jared Ahmad Lee; Paul B. Reuter; Imad Yousif

Archive | 2016

LOADLOCK APPARATUS, COOLING PLATE ASSEMBLY, AND ELECTRONIC DEVICE PROCESSING SYSTEMS AND METHODS

Paul B. Reuter; Travis Morey

Archive | 2014

SLIT VALVE WITH A PRESSURIZED GAS BEARING

Michael R. Rice; Natan Schlimoff; Igor Krivts; Israel Avneri; Yoram Uziel; Erez Admoni; Paul B. Reuter; William T. Weaver

Archive | 2013

GAS APPARATUS, SYSTEMS, AND METHODS FOR CHAMBER PORTS

Nagendra V. Madiwal; Robert Irwin Decottignies; Andrew Nguyen; Paul B. Reuter; Angela R. Sico; Michael Kuchar; Travis Morey; Mitchell DiSanto

Archive | 2018

SYSTEMS, APPARATUS, AND METHODS FOR AN IMPROVED LOAD PORT

Luke W. Bonecutter; David Blahnik; Paul B. Reuter

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Jared Ahmad Lee

Applied Materials

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Imad Yousif

Applied Materials

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Aniruddha Pal

Applied Materials

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Ganesh Balasubramanian

Applied Materials

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JuanCarlos Rocha-Alvarez

Applied Materials

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Martin Jeffrey Salinas

Applied Materials

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Travis Morey

Applied Materials

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Andrew Nguyen

Applied Materials

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Angela R. Sico

Applied Materials

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Dale R. Du Bois

Applied Materials

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