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Dive into the research topics where Jared Ahmad Lee is active.

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Featured researches published by Jared Ahmad Lee.


Archive | 2012

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

Jared Ahmad Lee; Martin Jeffrey Salinas; Paul B. Reuter; Imad Yousif; Aniruddha Pal


Archive | 2011

TWIN CHAMBER PROCESSING SYSTEM

Ming Xu; Andrew Nguyen; Evans Lee; Jared Ahmad Lee; James P. Cruse; Corie Lynn Cobb; Martin Jeff Salinas; Anchel Sheyner; Ezra Robert Gold; John W. Lane


Archive | 2007

Method and apparatus for controlling gas flow to a processing chamber

Ezra Robert Gold; Richard Fovell; James P. Cruse; Jared Ahmad Lee; Bruno Geoffrion; Douglas A. Buchberger; Martin Jeff Salinas


Archive | 2007

Method and apparatus for gas flow measurement

Jared Ahmad Lee; Ezra Robert Gold; Chunlei Zhang; James P. Cruse; Richard Fovell


Archive | 2011

METHODS FOR REMOVING BYPRODUCTS FROM LOAD LOCK CHAMBERS

Jared Ahmad Lee; Benjamin Schwarz; Xiaoliang Zhuang; Eu Jin Lim; Aduato Diaz; Scott Williams; Andrew Nguyen; James P. Cruse


Archive | 2010

Apparatus for radial delivery of gas to a chamber and methods of use thereof

Jared Ahmad Lee; Martin Jeff Salinas; Ankur Agarwal; Ezra Robert Gold; James P. Cruse; Aniruddha Pal; Andrew Nguyen


Archive | 2009

METHOD AND APPARATUS OF A SUBSTRATE ETCHING SYSTEM AND PROCESS

Sharma Pamarthy; Jon C. Farr; Khalid Sirajuddin; Ezra Robert Gold; James P. Cruse; Scott Olszewski; Roy C. Nangoy; Saravjeet Singh; Douglas A. Buchberger; Jared Ahmad Lee; Chunlei Zhang


Archive | 2011

Process chambers having shared resources and methods of use thereof

Jared Ahmad Lee; James P. Cruse; Andrew Nguyen; Corie Lynn Cobb; Ming Xu; Martin Jeff Salinas; Anchel Sheyner


Archive | 2015

Plasma erosion resistant thin film coating for high temperature application

Vahid Firouzdor; Biraja P. Kanungo; Jennifer Y. Sun; Martin Jeff Salinas; Jared Ahmad Lee


Archive | 2010

SYSTEM AND METHOD FOR CALIBRATING PRESSURE GAUGES IN A SUBSTRATE PROCESSING SYSTEM

James P. Cruse; Ezra Robert Gold; Jared Ahmad Lee; Ming Xu

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