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Paul Edward Gee

Applied Materials

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Publication

Featured researches published by Paul Edward Gee.

Archive | 2007

Chemical vapor deposition of high quality flow-like silicon dioxide using a silicon containing precursor and atomic oxygen

Nitin K. Ingle; Zheng Yuan; Paul Edward Gee; Kedar Sapre

Archive | 1999

Methods and apparatus for forming ultra-shallow doped regions using doped silicon oxide films

Ellie Yieh; Li-Qun Xia; Paul Edward Gee; Bang Nguyen

Archive | 2011

Two silicon-containing precursors for gapfill enhancing dielectric liner

Sidharth Bhatia; Hiroshi Hamana; Paul Edward Gee; Shankar Venkataraman

Archive | 2010

Reduced pattern loading using bis(diethylamino)silane (C8H22N2Si) as silicon precursor

Sasha Kweskin; Paul Edward Gee; Shankar Venkataraman; Kedar Sapre

Archive | 2010

Silicon-ozone CVD with reduced pattern loading using incubation period deposition

Sasha Kweskin; Paul Edward Gee; Shankar Venkataraman; Kedar Sapre

Archive | 2011

Reduced pattern loading using silicon oxide multi-layers

Sidharth Bhatia; Paul Edward Gee; Shankar Venkataraman

Archive | 2009

PRECURSOR ADDITION TO SILICON OXIDE CVD FOR IMPROVED LOW TEMPERATURE GAPFILL

Shankar Venkataraman; Hiroshi Hamana; Manuel A. Hernandez; Nitin K. Ingle; Paul Edward Gee

Archive | 2007

Vacuum chucking heater of axisymmetrical and uniform thermal profile

Siqing Lu; Balaji Chandrasekaran; Paul Edward Gee; Nitin K. Ingle; Dmitry Lubomirsky; Zheng Yuan; Ellie Yieh

Archive | 1996

Method and apparatus for forming a dielectric film using helium as a carrier gas

Ellie Yieh; Paul Edward Gee; Li-Qun Xia; Francimar Campana; Shankar Venkataranan; Dana Tribula; Bang Nguyen

Archive | 2008

Gas mixing swirl insert assembly

Edwin C. Suarez; Karthik Janakiraman; Paul Edward Gee

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Collaboration

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Shankar Venkataraman

Applied Materials

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Kedar Sapre

Applied Materials

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Nitin K. Ingle

Applied Materials

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Ellie Yieh

Applied Materials

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Hiroshi Hamana

Applied Materials

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Sasha Kweskin

Applied Materials

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Sidharth Bhatia

Applied Materials

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Bang Nguyen

Applied Materials

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Francimar Campana

Applied Materials

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Li-Qun Xia

Applied Materials

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