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Peter Nehmiz

IBM

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Publication

Featured researches published by Peter Nehmiz.

Archive | 1983

Method of compensating the proximity effect in electron beam projection systems

Harald Bohlen; Helmut Engelke; Johann Greschner; Peter Nehmiz

Archive | 1982

Shadow projection mask for ion implantation and ion beam lithography

Harald Bohlen; Johann Greschner; Peter Nehmiz

Archive | 1982

Method of making mask for structuring surface areas

Harald Bohlen; Helmut Engelke; Johann Greschner; Peter Nehmiz

Ibm Journal of Research and Development | 1982

Electron-beam proximity printing: a new high-speed lithography method for submicron structures

Harald Bohlen; Johann Greschner; Joachim Keyser; Werner Dr. Kulcke; Peter Nehmiz

Archive | 1980

Alignment system for particle beam lithography

Harald Bohlen; Johann Greschner; Werner Kulcke; Peter Nehmiz

Archive | 1984

Method of transferring a pattern into a radiation-sensitive layer

Harald Bohlen; Erwin Bretscher; Helmut Engelke; Peter Nehmiz; Peter Vettiger; Johann Greschner

Archive | 1978

Method of exposure by means of corpuscular beam shadow printing

Harald Bohlen; Johann Greschner; Werner Kulcke; Peter Nehmiz

Archive | 1984

Electron beam projection lithography

Uwe Dr. Dipl.-Phys. Behringer; Harald Bohlen; Werner Dr. Kulcke; Peter Nehmiz

Archive | 1985

Error-corrected corpuscular beam lithography

Uwe Behringer; Harald Bohlen; Peter Nehmiz; Werner Zapka

Archive | 1980

Mask for structuring surface areas, and method of making it

Harald Bohlen; Helmut Engelke; Johann Greschner; Peter Nehmiz

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Harald Bohlen

IBM

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Johann Greschner

IBM

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Helmut Engelke

IBM

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Werner Dr. Kulcke

IBM

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Werner Kulcke

IBM

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Erwin Bretscher

IBM

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Peter Vettiger

IBM

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Reinhold Mühl

IBM

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Uwe Behringer

IBM

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Werner Zapka

IBM

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