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Petra Felsner

Infineon Technologies

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Publication

Featured researches published by Petra Felsner.

Archive | 2001

FBEOL process for Cu metallizations free from Al-wirebond pads

Hans-Joachim Barth; Petra Felsner; Erdem Kaltalioglu; Gerald Friese

Archive | 2003

Methods of forming MIM capacitors

Hans-Joachim Barth; Petra Felsner; Erdem Kaltalioglu; Gerald R. Friese

Archive | 2001

METHOD OF MAKING A MIM CAPACITOR WITH SELF-PASSIVATING PLATES

Hans-Joachim Barth; Gerald Friese; Petra Felsner

Archive | 2003

Single mask MIM capacitor top plate

Hans-Joachim Barth; Petra Felsner; Erdem Kaltalioglu; Gerald Friese

Archive | 2001

Zero mask MIMcap process for a low k BEOL

Michael Stetter; Petra Felsner; Andreas K. Augustin; Gabriela Brase; Andy Cowley; Gerald Friese

Archive | 2007

Capacitor and Method of Manufacturing a Capacitor

Petra Felsner; Thomas Schafbauer; Uwe Kerst; Hans-Joachim Barth; Erdem Kaltalioglu

Archive | 2004

Capacitor, semiconductor device with a capacitor and method of manufactuing thereof

Hans-Joachim Barth; Petra Felsner; Erdem Kaltalioglu; Uwe Kerst; Thomas Schafbauer

Archive | 2005

MIM capacitor with a cap layer over the conductive plates

Hans-Joachim Barth; Petra Felsner; Erdem Kaltalioglu; Gerald R. Friese

Archive | 2008

MIM capacitors with catalytic activation layer

Hans-Joachim Barth; Petra Felsner; Erdem Kaltalioglu; Gerald R. Friese

Archive | 2004

KONDENSATOR, HALBLEITERBAUELEMENT MIT EINEM KONDENSATOR UND VERFAHREN ZUR HERSTELLUNG DERSELBEN

Hans-Joachim Barth; Petra Felsner; Erdem Kaltalioglu; Uwe Kerst; Thomas Schafbauer

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Hans-Joachim Barth

Infineon Technologies

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Erdem Kaltalioglu

Infineon Technologies

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Thomas Schafbauer

Infineon Technologies

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Uwe Kerst

Infineon Technologies

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Gerald Friese

IBM

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Gerald R. Friese

Infineon Technologies

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Andy Cowley

Infineon Technologies

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Michael Stetter

University College West

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Andreas K. Augustin

IBM

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Erdem Kaltalioglu

Infineon Technologies

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