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Richard Solarz

KLA-Tencor

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Publication

Featured researches published by Richard Solarz.

Archive | 2010

EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers

Yung-Ho Chuang; Richard Solarz; David R. Shafer; Bing-Ming Benjamin Tsai; David L. Brown

Archive | 2005

Coherent duv illumination for semiconductor wafer inspection

Richard Solarz

Archive | 2015

High Throughput Hot Testing Method And System For High-Brightness Light-Emitting Diodes

Richard Solarz

Archive | 2010

Multi-Wavelength Pumping to Sustain Hot Plasma

Ilya Bezel; Anatoly Shchemelinin; Eugene Shifrin; Matthew Derstine; Richard Solarz

Archive | 2012

Optical imaging system with laser droplet plasma illuminator

Richard Solarz; Stephane Durant; Shiow-Hwei Hwang

Archive | 2003

High transmission optical inspection tools

Richard Solarz

Archive | 2014

SUB 200NM LASER PUMPED HOMONUCLEAR EXCIMER LASERS

Richard Solarz; llya Bezel; Anatoly Shchemelinin

Archive | 2016

System and Method for Inhibiting Radiative Emission of a Laser-Sustained Plasma Source

Ilya Bezel; Anatoly Shchemelinin; Kenneth P. Gross; Richard Solarz; Lauren Wilson; Rahul Yadav; Joshua Wittenberg; Anant Chimmalgi; Xiumei Liu; Brooke Bruguier

Archive | 2015

System and Method for Transverse Pumping of Laser-Sustained Plasma

Ilya Bezel; Anatoly Shchemelinin; Richard Solarz; Sebaek Oh; Matthew Derstine

Archive | 2017

System und Verfahren zum transversalen Pumpen eines lasergestützten Plasmas

Anatoly Shchemelinin; Richard Solarz; Ilya Bezel; Sebaek Oh; Matthew Derstine

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Collaboration

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Anatoly Shchemelinin

KLA-Tencor

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Ilya Bezel

KLA-Tencor

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Matthew Derstine

KLA-Tencor

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Sebaek Oh

KLA-Tencor

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Anant Chimmalgi

KLA-Tencor

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Brooke Bruguier

KLA-Tencor

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Joshua Wittenberg

KLA-Tencor

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Kenneth P. Gross

KLA-Tencor

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Lauren Wilson

KLA-Tencor

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Rahul Yadav

KLA-Tencor

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