Rinji Sugino
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Publication
Featured researches published by Rinji Sugino.
international electron devices meeting | 2006
Rinji Sugino; Takashi Ito
A novel technique in creating a cavity by using a membrane of Si-native oxide has been developed. The membrane of Si-native oxide was formed by high-selectivity Cl2 etching of Si which surface was treated by wet chemicals. Following film deposition onto the membrane which was supported by SiO2 mask can make a cavity in the substrate. The advantage of this technique is its ability to maintain the CD of cavity even after film deposition to seal the via-opening
Archive | 2008
Inkuk Kang; Gang Xue; Shenqing Fang; Rinji Sugino; Yi Ma
Archive | 2003
Arvind Halliyal; Fred T K Cheung; Rinji Sugino; Hidehiko Shiraiwa; Tazrien Kamal; Jean Y. Yang
Archive | 2003
Hidehiko Shiraiwa; Tazrien Kamal; Mark T. Ramsbey; Inkuk Kang; Jaeyong Park; Rinji Sugino; Jean Y. Yang; Fred T K Cheung; Arvind Halliyal; Amir H. Jafarpour
Archive | 2003
Angela Hui; Minh V. Ngo; Ning Cheng; Jaeyong Park; Jean Y. Yang; Hidehiko Shiraiwa; Rinji Sugino; Tazrien Kamal; Cinti X. Chen
Archive | 2007
Chungho Lee; Hiroyuki Kinoshita; Zoran Krivokapic; Wei Zheng; Mark S. Chang; Rinji Sugino; Chi Chang
Archive | 2003
Tazrien Kamal; Arvind Halliyal; Minh Van Ngo; Mark T. Ramsbey; Jean Y. Yang; Hidehiko Shiraiwa; Rinji Sugino
Archive | 2003
Tazrien Kamal; Yun Wu; Mark T. Ramsbey; Jean Yee-Mei Yang; Arvind Halliyal; Rinji Sugino; Hidehiko Shiraiwa; Fred Cheung
Archive | 2002
Minh Van Ngo; Arvind Halliyal; Tazrien Kamal; Hidehiko Shiraiwa; Rinji Sugino; Dawn M. Hopper; Pei-Yuan Gao
Archive | 2008
YouSeok Suh; Shenqing Fang; Kuo Tung Chang; Rinji Sugino; Yi Ma; Eunha Kim
