Robert A. Garcia

Advances in roll-to-roll imprint lithography for display applications

A solution to the problems of roll-to-roll lithography on flexible substrates is presented. We have developed a roll-toroll imprint lithography technique to fabricate active matrix transistor backplanes on flexible webs of polyimide that have a blanket material stack of metals, dielectrics, and semiconductors. Imprint lithography produces a multi-level 3- dimensional mask that is then successively etched to pattern the underlying layers into the desired structures. This process, Self-Aligned Imprint Lithography (SAIL), solves the layer-to-layer alignment problem because all masking levels are created with one imprint step. The processes and equipment required for complete roll-to-roll SAIL fabrication will be described. Emphasis will be placed on the advances in the roll-to-roll imprint process which have enabled us to produce working transistor arrays.

23.4: Invited Paper: Active‐Matrix Backplanes Produced by Roll‐to‐Roll Self‐Aligned Imprint Lithography (SAIL)

Progress in the development of a fully roll-to-roll self-aligned imprint process for producing active matrix backplanes with submicron aligned features on flexible substrates is reported. High performance transistors, crossovers and addressable active matrix arrays have been designed and fabricated using imprint lithography. Such a process has the potential of significantly reducing the costs of large area displays. The progress, current status and remaining issues of this new fabrication technology are presented.

77.3: Invited Paper: Roll‐to‐Roll Manufacturing of Backplanes for Paper‐Like Displays

HP and Phicot are planning the worlds first R2R (roll-to-roll) manufacturing line for display backplanes based on the SAIL (Self-Aligned Imprint Lithography) process. Economic benefits for R2R compared to batch, cost comparisons of different R2R processes, comparison of substrate options, and necessary supply chain infrastructure developments are presented.

Defect analysis of roll-to-roll SAIL manufactured flexible display backplanes

HP and Phicot have made the worlds first roll-to-roll (R2R) manufactured active matrix displays. Currently we are developing a wrist-worn solar powered display for the U.S. Army. As we scale from research to preproduction on our 1/3 meter wide pilot line defect analysis and mitigation is our primary focus. In this presentation we will review the self-aligned imprint lithography (SAIL) process and discuss defects we observe, and the tools, and processes we have developed to detect and eliminate them

73.2L: Late‐News Paper: A Multi‐View Projection Display

We describe a multi-view projection system. The system comprises multiple projectors and a screen with scattering angles that can be tailored to suit the viewing environments. The tailoring of the scattering angles is accomplished by incorporating micro-structures onto the screen surface. We have fabricated screens with horizontal scattering angles ranging from <1° to over 100° FWHM. We demonstrate a three-view display system with negligible crosstalk between the views. We also demonstrate a glasses-free 3D prototype with 20 projectors and a contiguous angular viewing zone of about 10°. The capability to tailor the screen scattering angle in conjunction with novel optics enables us to expand greatly the number of views of the displays.

29.1: Invited Paper: Electrical Testing of Roll-to-Roll SAIL Manufactured Flexible Display Backplanes

HP and Phicot are making a fully roll-to roll fabricated display for a solar powered wrist display. We have developed methods for electrical testing of display backplanes on flexible substrates which are not bonded to a carrier. This has enabled improvement of yield through rapid electrical test feedback.