Robert G. Ozarski | Researchain

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Featured researches published by Robert G. Ozarski.

Archive | 1999

Reliable modular production quality narrow-band high REP rate excimer laser

David W. Myers; Herve A. Besaucele; Palash P. Das; Thomas P. Duffey; Alexander I. Ershov; Igor V. Fomenkov; Thomas Hofmann; Richard G. Morton; Richard M. Ness; Peter C. Newman; Robert G. Ozarski; Gamaralalage G. Padmabandu; William N. Partlo; Daniel A. Rothweil; Richard L. Sandstrom; Paul S. Thompson; Richard C. Ujazdowski; Tom A. Watson; R. Kyle Webb; Paolo Zambon

Archive | 1998

RELIABLE, MODULAR, PRODUCTION QUALITY NARROW-BAND KrF EXCIMER LASER

David S. Knowles; James H. Azzola; Herve A. Besaucele; Palash P. Das; Alexander I. Ershov; Igor V. Fomenkov; Tibor Juhasz; Robert G. Ozarski; William N. Partlo; Daniel A. Rothweil; Richard L. Sandstrom; Richard C. Ujazdowski; Tom A. Watson; Richard M. Ness

Archive | 1998

Laser-illuminated stepper or scanner with energy sensor feedback

Richard L. Sandstrom; Palash P. Das; Igor V. Fomenkov; Herve A. Besaucele; Robert G. Ozarski

Archive | 1999

Laser chamber with minimized acoustic and shock wave disturbances

Tibor Juhasz; Richard C. Ujazdowski; Herve A. Besaucele; Robert G. Ozarski; James H. Azzola

Archive | 1999

Multiplexer for laser lithography

Robert G. Ozarski; Alexander I. Ershov

Archive | 2000

Laser chamber installation in and removal from a laser system housing

Robert G. Ozarski

Archive | 1999

Portable laser beam monitor

Jesse D. Buck; Robert G. Ozarski

Archive | 2001

Large diffraction grating for gas discharge laser

Daniel J. W. Brown; Alexander I. Ershov; Scott T. Smith; Robert G. Ozarski

Archive | 1999

MODULARER, SCHMALBANDIGER KrF-EXCIMERLASER

David S. Knowles; James H. Azzola; Herve A. Besaucele; Palash P. Das; Alexander I. Ershov; Tibor Juhasz; Richard M. Ness; Robert G. Ozarski; William N. Partlo; Daniel A. Rothweil; Richard L. Sandstrom; Richard C. Ujazdowski; Tom A. Watson; Igor V. Fomenkov

Archive | 1999